The Temperature Dependence of Ion Beam Mixing of Zr on A12O3
Keyword(s):
Ion Beam
◽
ABSTRACTThree hundred angstrom Zr films were deposited on A12O3 substrates and irradiated with 300 keV Xe ions to a dose of 1 × 1016 /cm2. The irradiation was carried out at 77 K, 300 K (ambient temperature), and 800 K. Changes in the deposited film and the Zr-A12O3 interface were examined by comparing Rutherford backscattering spectra from irradiated and unirradiated regions of the samples. Ion beam induced reactions were observed at all three temperatures. The systematics of the temperature dependence of ion beam mixing are discussed.
1987 ◽
Vol 2
(2)
◽
pp. 211-215
◽
1989 ◽
Vol 39
(1-4)
◽
pp. 122-125
◽
2012 ◽
Vol 37
(1)
◽
pp. 201-207