Temperature dependence of ion‐beam mixing in III–V semiconductors

1995 ◽  
Vol 77 (7) ◽  
pp. 3543-3545 ◽  
Author(s):  
D. V. Forbes ◽  
J. J. Coleman ◽  
J. L. Klatt ◽  
R. S. Averback
1993 ◽  
Vol 63 (7) ◽  
pp. 976-978 ◽  
Author(s):  
J. L. Klatt ◽  
R. S. Averback ◽  
D. V. Forbes ◽  
J. J. Coleman

2014 ◽  
Vol 115 (2) ◽  
pp. 023506 ◽  
Author(s):  
M. Radek ◽  
H. Bracht ◽  
M. Posselt ◽  
B. Liedke ◽  
B. Schmidt ◽  
...  

1993 ◽  
Vol 311 ◽  
Author(s):  
D.D. Forbes ◽  
J.J. Coleman ◽  
J.J. Klatt ◽  
R.R. Averback

ABSTRACTIon beam mixing of In0.20Ga0.80As quantum well marker layers in GaAs following 1 MeV Kr ion irradiation has been measured as a function of irradiation temperature and fluence. Secondary Ion Mass Spectrometry (SIMS) was used to measure the diffusion of the In0.20Ga0.80As layer following irradiation at various temperatures. Rutherford Backscattering (RBS) and channeling methods were used to determine the extent of the amorphization as a result of the implantation. The mixing parameter of the In0.20Ga0.80As in the GaAs matrix increased from σ120 Å5/eV at 77K to σ160Å5/eV in the temperature range of 300K–450K, but decreased somewhat at 573K. This behavior of In0.20Ga0.80As marker layers will be compared to AlAs marker layers which show similar temperature dependence. These results are interpreted on the basis of thermal spikes and crystal structure.


1986 ◽  
Vol 82 ◽  
Author(s):  
G. C. Farlow ◽  
S. P. Withrow ◽  
D. S. Easton

ABSTRACTThree hundred angstrom Zr films were deposited on A12O3 substrates and irradiated with 300 keV Xe ions to a dose of 1 × 1016 /cm2. The irradiation was carried out at 77 K, 300 K (ambient temperature), and 800 K. Changes in the deposited film and the Zr-A12O3 interface were examined by comparing Rutherford backscattering spectra from irradiated and unirradiated regions of the samples. Ion beam induced reactions were observed at all three temperatures. The systematics of the temperature dependence of ion beam mixing are discussed.


Author(s):  
A. K. Rai ◽  
R. S. Bhattacharya ◽  
M. H. Rashid

Ion beam mixing has recently been found to be an effective method of producing amorphous alloys in the binary metal systems where the two original constituent metals are of different crystal structure. The mechanism of ion beam mixing are not well understood yet. Several mechanisms have been proposed to account for the observed mixing phenomena. The first mechanism is enhanced diffusion due to defects created by the incoming ions. Second is the cascade mixing mechanism for which the kinematicel collisional models exist in the literature. Third mechanism is thermal spikes. In the present work we have studied the mixing efficiency and ion beam induced amorphisation of Ni-Ti system under high energy ion bombardment and the results are compared with collisional models. We have employed plan and x-sectional veiw TEM and RBS techniques in the present work.


1988 ◽  
Vol 106 (4) ◽  
pp. 297-309 ◽  
Author(s):  
D. M. Phase ◽  
Jayashree Patankar ◽  
V. N. Kulkarni ◽  
S. B. Ogale

2020 ◽  
Vol 1713 ◽  
pp. 012012
Author(s):  
P V Bykov ◽  
V L Vorob’ev ◽  
I N Klimova ◽  
A A Kolotov ◽  
A Yu Drozdov ◽  
...  

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