Properties of Oxide Film Atomic Layer Deposited from Tetraethoxy Silane, Hafnium Halides, and Water

2004 ◽  
Vol 151 (5) ◽  
pp. F98 ◽  
Author(s):  
Kaupo Kukli ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
Timo Sajavaara ◽  
Juhani Keinonen ◽  
...  
Keyword(s):  
Oxide Film ◽  
Atomic Layer ◽  
Tetraethoxy Silane

Thermal stability of atomic-layer-deposited ultra-thin niobium oxide film on Si (100)

2011 ◽  
Vol 257 (16) ◽  
pp. 7305-7309 ◽  
Author(s):  
Yue Huang ◽  
Yan Xu ◽  
Shi-Jin Ding ◽  
Hong-Liang Lu ◽  
Qing-Qing Sun ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Oxide Film ◽  
Niobium Oxide ◽  
Atomic Layer ◽  
Thermal Stability Of

Engineering the Growth of MoS2via Atomic Layer Deposition of Molybdenum Oxide Film Precursor

2016 ◽  
Vol 2 (10) ◽  
pp. 1600330 ◽  
Author(s):  
Christian Martella ◽  
Pierpaolo Melloni ◽  
Eugenio Cinquanta ◽  
Elena Cianci ◽  
Mario Alia ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxide Film ◽  
Molybdenum Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Improved Growth and Electrical Properties of Atomic-Layer-Deposited Metal-Oxide Film by Discrete Feeding Method of Metal Precursor

2011 ◽  
Vol 23 (7) ◽  
pp. 1654-1658 ◽  
Author(s):  
Tae Joo Park ◽  
Jeong Hwan Kim ◽  
Jae Hyuck Jang ◽  
Un Ki Kim ◽  
Sang Young Lee ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Oxide Film ◽  
Metal Oxide ◽  
Atomic Layer ◽  
Feeding Method ◽  
Metal Precursor ◽  
Deposited Metal ◽  
Metal Oxide Film

Radical-Enhanced Atomic Layer Deposition of a Tungsten Oxide Film with the Tunable Oxygen Vacancy Concentration

2020 ◽  
Vol 124 (33) ◽  
pp. 18156-18164 ◽  
Author(s):  
Roman I. Romanov ◽  
Maxim G. Kozodaev ◽  
Yury Y. Lebedinskii ◽  
Timofey V. Perevalov ◽  
Aleksandr S. Slavich ◽  
...  
Keyword(s):  
Oxygen Vacancy ◽  
Atomic Layer Deposition ◽  
Oxide Film ◽  
Tungsten Oxide ◽  
Vacancy Concentration ◽  
Atomic Layer ◽  
Oxygen Vacancy Concentration ◽  
Layer Deposition ◽  
Tungsten Oxide Film

A comparative study on atomic layer deposited oxide film morphology and their electrical breakdown

2020 ◽  
Vol 399 ◽  
pp. 126123
Author(s):  
I. Reklaitis ◽  
E. Radiunas ◽  
T. Malinauskas ◽  
S. Stanionytė ◽  
G. Juška ◽  
...  
Keyword(s):  
Oxide Film ◽  
Comparative Study ◽  
Electrical Breakdown ◽  
Atomic Layer ◽  
Film Morphology

A study of highly crystalline novel beryllium oxide film using atomic layer deposition

2011 ◽  
Vol 334 (1) ◽  
pp. 126-133 ◽  
Author(s):  
J.H. Yum ◽  
T. Akyol ◽  
M. Lei ◽  
D.A. Ferrer ◽  
Todd.W. Hudnall ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Oxide Film ◽  
Beryllium Oxide ◽  
Atomic Layer ◽  
Layer Deposition
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