Improved Growth and Electrical Properties of Atomic-Layer-Deposited Metal-Oxide Film by Discrete Feeding Method of Metal Precursor

Tae Joo Park; Jeong Hwan Kim; Jae Hyuck Jang; Un Ki Kim; Sang Young Lee; Joohwi Lee; Hyung Suk Jung; Cheol Seong Hwang

doi:10.1021/cm100900k

Improved Growth and Electrical Properties of Atomic-Layer-Deposited Metal-Oxide Film by Discrete Feeding Method of Metal Precursor

Chemistry of Materials ◽

10.1021/cm100900k ◽

2011 ◽

Vol 23 (7) ◽

pp. 1654-1658 ◽

Cited By ~ 11

Author(s):

Tae Joo Park ◽

Jeong Hwan Kim ◽

Jae Hyuck Jang ◽

Un Ki Kim ◽

Sang Young Lee ◽

...

Keyword(s):

Electrical Properties ◽

Oxide Film ◽

Metal Oxide ◽

Atomic Layer ◽

Feeding Method ◽

Metal Precursor ◽

Deposited Metal ◽

Metal Oxide Film

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Formation of metal-oxide film nanostructures based on anodic alumina with uniformly distributed nanoscale Ta inclusions and their electrical properties

Journal of Physics Conference Series ◽

10.1088/1742-6596/1121/1/012010 ◽

2018 ◽

Vol 1121 ◽

pp. 012010

Author(s):

K V Chernyakova ◽

I A Vrublevsky ◽

E N Muratova ◽

V A Moshnikov

Keyword(s):

Electrical Properties ◽

Oxide Film ◽

Metal Oxide ◽

Anodic Alumina ◽

Metal Oxide Film

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Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition

Journal of Material Science and Technology ◽

10.1016/s1005-0302(10)60061-8 ◽

2010 ◽

Vol 26 (4) ◽

pp. 371-374 ◽

Cited By ~ 7

Author(s):

Ji-Hoon Ahn ◽

Se-Hun Kwon ◽

Jin-Hyock Kim ◽

Ja-Yong Kim ◽

Sang-Won Kang

Keyword(s):

Atomic Layer Deposition ◽

Oxide Film ◽

Metal Oxide ◽

Atomic Layer ◽

Surface Relaxation ◽

Surface Evolution ◽

Theoretical Simulation ◽

Layer Deposition ◽

Metal Oxide Film

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(Invited) The Surface Chemistry of Atomic Layer Deposition (ALD) Processes for Metal Nitride and Metal Oxide Film Growth

ECS Transactions ◽

10.1149/1.3485266 ◽

2019 ◽

Vol 33 (2) ◽

pp. 291-305 ◽

Cited By ~ 19

Author(s):

Menno Bouman ◽

Francisco Zaera

Keyword(s):

Atomic Layer Deposition ◽

Oxide Film ◽

Metal Oxide ◽

Surface Chemistry ◽

Film Growth ◽

Atomic Layer ◽

Metal Nitride ◽

Layer Deposition ◽

Metal Oxide Film

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Detail specification for fixed low power non-wirewound insulated resistors. Metal oxide film, helically cut. Full assessment level

10.3403/00142373u ◽

2015 ◽

Keyword(s):

Oxide Film ◽

Metal Oxide ◽

Low Power ◽

Metal Oxide Film

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Harmonized detail specification for fixed low power non-wirewound insulated resistors. Metal oxide film, helically cut. Full assessment level

10.3403/00147221u ◽

2015 ◽

Keyword(s):

Oxide Film ◽

Metal Oxide ◽

Low Power ◽

Metal Oxide Film

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Harmonized detail specification for fixed low power non-wirewound insulated resistors. Metal oxide film, helically cut. Full assessment level

10.3403/00147221 ◽

1976 ◽

Keyword(s):

Oxide Film ◽

Metal Oxide ◽

Low Power ◽

Metal Oxide Film

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Harmonized detail specification for fixed low power non-wirewound insulated resistors. Metal oxide film, helically cut. Full assessment level

10.3403/00147181 ◽

1975 ◽

Keyword(s):

Oxide Film ◽

Metal Oxide ◽

Low Power ◽

Metal Oxide Film

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Metal-oxide film and photonic structures for integrated device applications

10.37099/mtu.dc.etd-restricted/89 ◽

2009 ◽

Author(s):

Ziyou Zhou

Keyword(s):

Oxide Film ◽

Metal Oxide ◽

Photonic Structures ◽

Device Applications ◽

Integrated Device ◽

Metal Oxide Film

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Development of Transition Metal Oxide Film Coated Platforms for Aptamer Based Electrochemical Detection of Ochratoxin A

Journal of The Electrochemical Society ◽

10.1149/1945-7111/abff66 ◽

2021 ◽

Author(s):

Irem Aydın-Kırlangıc ◽

PINAR KARA ◽

Fatma Nil Ertas

Keyword(s):

Transition Metal ◽

Oxide Film ◽

Metal Oxide ◽

Ochratoxin A ◽

Electrochemical Detection ◽

Transition Metal Oxide ◽

Metal Oxide Film

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Selective adsorption of fluoride from drinking water using NiAl-layered metal oxide film electrode

Journal of Colloid and Interface Science ◽

10.1016/j.jcis.2018.12.062 ◽

2019 ◽

Vol 539 ◽

pp. 146-151 ◽

Cited By ~ 16

Author(s):

Zhaoyu Bai ◽

Chengzhi Hu ◽

Huijuan Liu ◽

Jiuhui Qu

Keyword(s):

Drinking Water ◽

Oxide Film ◽

Metal Oxide ◽

Selective Adsorption ◽

Film Electrode ◽

Metal Oxide Film

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