Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors

2021 ◽  
Vol 39 (3) ◽  
pp. 032406
Author(s):  
Su-Hwan Choi ◽  
Hyun-Jun Jeong ◽  
TaeHyun Hong ◽  
Yong Hwan Na ◽  
Chi Kwon Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Oxide Film ◽  
Indium Oxide ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Indium Oxide Film

scholarly journals Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors

2018 ◽  
Vol 13 (1) ◽  
Author(s):  
Qian Ma ◽  
He-Mei Zheng ◽  
Yan Shao ◽  
Bao Zhu ◽  
Wen-Jun Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Indium Oxide ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Layer Deposition

Domain structure and optical property of epitaxial indium oxide film deposited on MgO(100) substrate

2011 ◽  
Vol 605 (9-10) ◽  
pp. 977-981 ◽  
Author(s):  
Lingyi Kong ◽  
Jin Ma ◽  
Caina Luan ◽  
Zhen Zhu ◽  
Qiaoqun Yu
Keyword(s):  
Optical Property ◽  
Oxide Film ◽  
Domain Structure ◽  
Indium Oxide ◽  
Indium Oxide Film

Mobility Enhancement and OFF Current Suppression in Atomic-Layer-Deposited ZnO Thin-Film Transistors by Post Annealing in O2

2014 ◽  
Vol 35 (12) ◽  
pp. 1266-1268 ◽  
Author(s):  
Yang Geng ◽  
Wen Yang ◽  
Hong-Liang Lu ◽  
Yuan Zhang ◽  
Qing-Qing Sun ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Post Annealing

High Performance Solution-Processed Indium Oxide Thin-Film Transistors

2008 ◽  
Vol 130 (38) ◽  
pp. 12580-12581 ◽  
Author(s):  
Hyun Sung Kim ◽  
Paul D. Byrne ◽  
Antonio Facchetti ◽  
Tobin J. Marks
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Thin Film ◽  
Solution Processed ◽  
Indium Oxide Thin Film

Solution-Processed Zinc Indium Oxide Transparent Nonvolatile Memory Thin-Film Transistors with Polymeric Ferroelectric Gate Insulator

2010 ◽  
Vol 13 (5) ◽  
pp. H141 ◽  
Author(s):  
Sung-Min Yoon ◽  
Shin-Hyuk Yang ◽  
Soon-Won Jung ◽  
Chun-Won Byun ◽  
Sang-Hee Ko Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Thin Film Transistors ◽  
Nonvolatile Memory ◽  
Gate Insulator ◽  
Solution Processed ◽  
Zinc Indium Oxide
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