Ion-beam sputter-deposited SiN/TiN attenuating phase-shift photoblanks

2001 ◽  
Author(s):  
Laurent Dieu ◽  
Peter F. Carcia ◽  
Hideaki Mitsui ◽  
Kunihiko Ueno
1992 ◽  
Vol 262 ◽  
Author(s):  
A. van Veen ◽  
M. J. W. Greuter ◽  
L. Niesen ◽  
B. Nielsen ◽  
K.G. Lynn

ABSTRACTGas desorption measurements have been performed on sputter deposited silicon films. The sputter gas was argon or krypton. Parameters influencing the incorporation process e.g. bias voltage, substrate temperature and arrival rate ratio of silicon and noble gas atoms have been systematically varied. The films, a-Si and c-Si, have been characterised by various techniques for composition and defect analysis. A model has been applied to describe the composition of the growing silicon layer. Underlying mechanisms like gas-gas sputtering have been studied in separate ion implantation experiments. For a-Si concentrations as high as 6% Ar and Kr have been found. An important effect is the injection of self- interstitial atoms caused by the low energy heavy ion bombardment. It causes the layer to grow without large open volume defects.


1992 ◽  
Vol 104-107 ◽  
pp. 1847-1850 ◽  
Author(s):  
Michael A. Russak ◽  
Christopher V. Jahnes ◽  
Erik Klokholm ◽  
Bojan Petek

1991 ◽  
Vol 49 (1-3) ◽  
pp. 457-461 ◽  
Author(s):  
K. Bouslykhane ◽  
P. Moine ◽  
J.P. Villain ◽  
J. Grilhé

1992 ◽  
Vol 36 ◽  
pp. 273-278
Author(s):  
P.A. Pella ◽  
W.R. Kelly ◽  
K.E. Murphy ◽  
E.B. Steel ◽  
S.B. Schiller

NIST SRM 2708 is a thin film of zinc sulfide approximately 0.02 μm thick that was sputter deposited on polycarbonate substrates using a NIST ion-beam instrument. It is intended for the standardization of x-ray fluorescence spectrometers, especially for analysis of air particulates or similar material collected on filter media.


1994 ◽  
Vol 337 ◽  
Author(s):  
S.W. Russell ◽  
A.E. Bair ◽  
M.J. Rack ◽  
D. Adams ◽  
R.L. Spreitzer ◽  
...  

ABSTRACTWe investigate the nitridation of chromium films in an NH3 ambient at 500°C. Rutherford backscattering spectrometry using 2.0 MeV He2+ was utilized to determine the compositions of thick reacted layers and to provide calibration for the other techniques. In addition, analysis was performed using the 14N(α,α)14N resonance at 3.72 MeV in order to enhance sensitivity to nitrogen. Sputter-deposited TiN was used as a calibration for the cross section a for this resonance over the energy range 3.05-3.85 MeV and compared to the literature value. We find that analysis just above the peak in the resonance provides excellent sensitivity to N concentration in the nitride layers. This approach may be readily used in conjunction with 2.0 MeV backscattering to determine the overall composition and sample configuration. Auger electron spectroscopy was used to provide more depth sensitivity in compositional profiling and to monitor the oxygen impurity distribution. X-ray diffraction was used to identify phases in both as-deposited and annealed films.


2020 ◽  
Vol 27 (6) ◽  
pp. 1633-1639
Author(s):  
Kiranjot ◽  
Mohammed H. Modi ◽  
Raj Kumar Gupta ◽  
Mangalika Sinha ◽  
Praveen Kumar Yadav

Transition elements exhibit strong correlations and configuration interactions between core and valence excited states, which give rise to different excitations inside materials. Nickel exhibits satellite features in its emission and absorption spectra. Effects of such transitions on the optical constants of nickel have not been reported earlier and the available database of Henke et al. does not represent such fine features. In this study, the optical behaviour of ion beam sputter deposited Ni thin film near the L 2,3-edge region is investigated using reflection spectroscopy techniques, and distinct signatures of various transitions are observed. The soft X-ray reflectivity measurements in the 500–1500 eV photon energy region are performed using the soft X-ray reflectivity beamline at the Indus-2 synchrotron radiation source. Kramers–Kronig analysis of the measured reflectivity data exhibit features corresponding to spin orbital splitting and satellite transitions in the real and imaginary part of the refractive index (refraction and absorption spectra). Details of fine features observed in the optical spectra are discussed. To the best of our knowledge, this is the first study reporting fine features in the measured optical spectra of Ni near its L 2,3-edge region.


Sign in / Sign up

Export Citation Format

Share Document