Effects of photoresist polymer molecular weight on line-edge roughness and its metrology probed with Monte Carlo simulations

2004 ◽  
Vol 75 (3) ◽  
pp. 297-308 ◽  
Author(s):  
G.P. Patsis ◽  
V. Constantoudis ◽  
E. Gogolides
Keyword(s):  
Molecular Weight ◽  
Monte Carlo ◽  
Monte Carlo Simulations ◽  
Line Edge Roughness ◽  
Polymer Molecular Weight ◽  
Edge Roughness ◽  
On Line

Molecular weight effect on line-edge roughness

2003 ◽  
Author(s):  
Toru Yamaguchi ◽  
Kenji Yamazaki ◽  
Hideo Namatsu
Keyword(s):  
Molecular Weight ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Weight Effect ◽  
On Line
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