scholarly journals LEEDUS: A MICROMACHINING PROCESS FOR DIE-SCALE PATTERN TRANSFER IN CERAMICS WITH HIGH RESOLUTION AND THROUGHPUT

2004 ◽  
Author(s):  
T. Li ◽  
Y.B. Gianchandani
Keyword(s):  
High Resolution ◽  
Pattern Transfer

High resolution pattern transfer in III-nitrides using BCl3/Ar inductively coupled plasmas

1998 ◽  
Vol 42 (9) ◽  
pp. 1719-1722
Author(s):  
Hyun Cho ◽  
S.M Donovan ◽  
J.D MacKenzie ◽  
C.R Abernathy ◽  
S.J Pearton ◽  
...  
Keyword(s):  
High Resolution ◽  
Pattern Transfer ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

A photoacid generator integrated terpolymer for electron beam lithography applications: sensitive resist with pattern transfer potential

2017 ◽  
Vol 1 (9) ◽  
pp. 1895-1899 ◽  
Author(s):  
Santu Nandi ◽  
Midathala Yogesh ◽  
Pulikanti Guruprasad Reddy ◽  
Satinder K. Sharma ◽  
Chullikkattil P. Pradeep ◽  
...  
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Pattern Transfer ◽  
Photoacid Generator ◽  
Transfer Potential

A new PAG integrated electron beam active terpolymer resist has been developed for high resolution pattern transfer applications.

Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer

ACS Nano ◽  
2018 ◽  
Vol 12 (11) ◽  
pp. 11152-11160 ◽  
Author(s):  
Jean-François de Marneffe ◽  
Boon Teik Chan ◽  
Martin Spieser ◽  
Guy Vereecke ◽  
Sergej Naumov ◽  
...  
Keyword(s):  
High Resolution ◽  
High Performance ◽  
Pattern Transfer ◽  
Hard Mask

Evaluation of an advanced dual hard mask stack for high resolution pattern transfer

2013 ◽  
Author(s):  
J. Paul ◽  
M. Rudolph ◽  
S. Riedel ◽  
X. Thrun ◽  
S. Wege ◽  
...  
Keyword(s):  
High Resolution ◽  
Pattern Transfer ◽  
Hard Mask

High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer

Soft Matter ◽  
2008 ◽  
Vol 4 (1) ◽  
pp. 168-176 ◽  
Author(s):  
Isaac W. Moran ◽  
Dalton F. Cheng ◽  
Sarav B. Jhaveri ◽  
Kenneth R. Carter
Keyword(s):  
Thin Film ◽  
High Resolution ◽  
Soft Lithography ◽  
Pattern Transfer

Observations of the spatial structure of interstellar hydrogen

1967 ◽  
Vol 31 ◽  
pp. 45-46
Author(s):  
Carl Heiles
Keyword(s):  
High Resolution ◽  
Spatial Structure ◽  
Velocity Dispersion ◽  
Temperature Variations

High-resolution 21-cm line observations in a region aroundlII= 120°,b11= +15°, have revealed four types of structure in the interstellar hydrogen: a smooth background, large sheets of density 2 atoms cm-3, clouds occurring mostly in groups, and ‘Cloudlets’ of a few solar masses and a few parsecs in size; the velocity dispersion in the Cloudlets is only 1 km/sec. Strong temperature variations in the gas are in evidence.

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