Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer
1992 ◽
Vol 50
(2)
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pp. 1334-1335
2015 ◽
Vol 33
(10)
◽
pp. 1046
◽
2013 ◽
Vol 31
(10)
◽
pp. 961
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