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Fabrication of narrow-gap nanostructures using electron-beam induced deposition etch masks

2016 ◽  
Vol 153 ◽  
pp. 77-82 ◽  
Author(s):  
I.G.C. Weppelman ◽  
P.C. Post ◽  
C.T.H. Heerkens ◽  
C.W. Hagen ◽  
J.P. Hoogenboom
Keyword(s):  
Electron Beam ◽  
Narrow Gap ◽  
Electron Beam Induced Deposition ◽  
Etch Masks

Haze-Free Highly Transparent Glass Substrates with Nanostructured Surface by Using Self-Assembled Ag Etch Masks

2015 ◽  
Vol 5 (2) ◽  
pp. R6-R11 ◽  
Author(s):  
Dan Zhao ◽  
Illhwan Lee ◽  
Jae Yong Park ◽  
Sang-Hwan Cho ◽  
Chung Sock Choi ◽  
...  
Keyword(s):  
Nanostructured Surface ◽  
Transparent Glass ◽  
Glass Substrates ◽  
Self Assembled ◽  
Etch Masks

Pattern transfer with stabilized nanoparticle etch masks

2013 ◽  
Vol 24 (8) ◽  
pp. 085303 ◽  
Author(s):  
Charles R Hogg ◽  
Yoosuf N Picard ◽  
Amrit Narasimhan ◽  
James A Bain ◽  
Sara A Majetich
Keyword(s):  
Pattern Transfer ◽  
Etch Masks

scholarly journals Method to pattern etch masks in two inclined planes for three-dimensional nano- and microfabrication

2011 ◽  
Vol 29 (6) ◽  
pp. 061604 ◽  
Author(s):  
R. Willem Tjerkstra ◽  
Léon A. Woldering ◽  
Johanna M. van den Broek ◽  
Fred Roozeboom ◽  
Irwan D. Setija ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Etch Masks ◽  
Inclined Planes

Fabrication of metallic nanocones by induced deposition of etch masks and ion milling

2011 ◽  
Vol 88 (8) ◽  
pp. 2247-2250 ◽  
Author(s):  
M. Fleischer ◽  
A. Weber-Bargioni ◽  
S. Cabrini ◽  
D.P. Kern
Keyword(s):  
Ion Milling ◽  
Etch Masks

Nanoporous hard etch masks using silicon-containing block copolymer thin films

Polymer ◽  
2011 ◽  
Vol 52 (1) ◽  
pp. 86-90 ◽  
Author(s):  
Se Jin Ku ◽  
Su Min Kim ◽  
Chang Hong Bak ◽  
Jin-Baek Kim
Keyword(s):  
Thin Films ◽  
Block Copolymer ◽  
Etch Masks
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