A low-distortion ΣΔ capacitive microaccelerometer with self-test circuit
2015 ◽
Vol 52
(6)
◽
pp. 70-76
2016 ◽
Vol 10
(1)
◽
pp. 1-10
◽
Keyword(s):
2012 ◽
Vol 214
◽
pp. 534-537