Ion Beam Assisted Deposition- R&D to Production

1993 ◽  
Vol 316 ◽  
Author(s):  
James K. Hirvonen
Keyword(s):  
Ion Beam ◽  
Ion Bombardment ◽  
Vacuum Deposition ◽  
Ion Beam Assisted Deposition ◽  
Factors Influencing ◽  
Material Deposition ◽  
Deposition Processes ◽  
Reactive Ions

ABSTRACTIon Beam Assisted Deposition (IBAD) involves vacuum deposition processes which incorporate concurrent energetic ion bombardment and material deposition. The effects of the ions are to promote adhesion, densify the films, and to help chemically incorporate reactive ions into the coatings. Examples of IBAD studies that have progressed from R&D to production status are presented with a discussion of the technical and marketing factors influencing their commercial acceptance.

Microstructural observation of a composite film of c-BN and h-BN phases

2000 ◽  
Vol 15 (11) ◽  
pp. 2292-2295 ◽  
Author(s):  
Young-Joon Park ◽  
Young-Joon Baik ◽  
Jae Hyoung Choi ◽  
Jeong Yong Lee ◽  
Jun-Hee Hahn
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Composite Film ◽  
Ion Beam ◽  
Ion Bombardment ◽  
Deposition Process ◽  
Microstructural Observation ◽  
Ion Beam Assisted Deposition

BN films consisting of c-BN and h-BN phases were synthesized using an ion-beam-assisted deposition process. In contrast to conventional observations, the c-BN and h-BN phases did not form separate layers, but were distributed in the form of nano-sized grains throughout the film thickness. No distinctly aligned h-BN layer was observed before the c-BN phase. Such a mixed character of the film was attributed to a localized ion bombardment effect instead of the macro-stress. Possibly because of the presence of scattered h-BN phases, the thin film described here possessed a low hardness of about 20 GPa and a low stress of about 5 GPa, compared with other reported c-BN-containing films.

Metastable Materials Formation by ion Beam Assisted Deposition: Application to M Clusters in Ceramic Matrices

1997 ◽  
Vol 504 ◽  
Author(s):  
C. A. Carosella ◽  
G. K. Hubler ◽  
C. M. Cotell ◽  
S. Schiestel
Keyword(s):  
Niobium Oxide ◽  
Film Growth ◽  
Ion Beam ◽  
Synthesis Methods ◽  
Metal Nanoclusters ◽  
Materials Synthesis ◽  
Beneficial Effects ◽  
Ion Beam Assisted Deposition ◽  
Deposition Processes ◽  
Ceramic Matrices

ABSTRACTThe collision cascade, the fundamental event in ion-solid interactions, is responsible for the beneficial effects on thin films deposited by low energy ion beam assisted deposition (IBAD) or by energetic ion assisted deposition processes in general. However, the fundamental implications of the marriage of collision cascades and film growth processes have yet to be fully realized. The first half of this paper reviews the effects of ion bombardment on film growth and reaches some new conclusions. We propose that IBAD represents a different ion-solid interaction in a fundamental sense, and that as such, it should lead to new microstructures unattainable by other materials synthesis methods.The second part of this paper discusses the deposition of metal nanoclusters in a dielectric matrix by means of beam assisted phase separation (BAPS), a term coined here to describe deposition of phase-separated multicomponent materials. Examples discussed are gold nanoparticles in both niobium oxide and silica matrices.

scholarly journals Tribomechanical Properties of a Carbon-Based Nanolayer Prepared by Nitrogen Ion Beam Assisted Deposition for Finger Joint Replacements

2018 ◽  
Vol 2018 ◽  
pp. 1-9 ◽  
Author(s):  
Tomas Horazdovsky ◽  
Radka Vrbova
Keyword(s):  
Ion Beam ◽  
Titanium Substrate ◽  
Surface Hardness ◽  
Ion Bombardment ◽  
Ti6al4v Alloy ◽  
Wear Testing ◽  
Ion Beam Assisted Deposition ◽  
Nitrogen Ion ◽  
Ion Assistance ◽  
Carbon Based

This paper presents the tribomechanical test results of Ti6Al4V alloy modified by carbon-based nanolayers with a thickness of 20 nm and 40 nm, prepared by nitrogen ion beam assisted deposition. The presence of carbon and nitrogen compounds was observed in the modified surface after ion bombardment. Nonstoichiometric TiNx was mainly detected near the interface nanolayer/titanium substrate and in the substrate itself. Ion bombardment led to an improved surface hardness of ~13 GPa in comparison to unmodified Ti6Al4V titanium alloy (~5.5 GPa) and alloy coated by carbon nanolayer without nitrogen ion assistance (~7 GPa). The decreasing of friction coefficient was achieved from 0.5–0.6 for untreated Ti6Al4V alloy to 0.1 for treated Ti6Al4V alloy. Wear testing using a joint wear simulator proved that the modified Ti6Al4V alloy has a higher resistance compared to the unmodified Ti6Al4V alloy. The primary local wear fault of the treated surface was observed after 240,000 cycles in comparison to enormous wear on the untreated surface after just 10,000 cycles. Treating the Ti6Al4V load-bearing components of implants with carbon-based nanolayers assisted by nitrogen ions is very promising in terms of extending the lifetime of implants and thereby reduces patient burden.

Ion-Beam-Assisted Deposition of Metal Nanocluster thin Films with Nonlinear Optical Properties

1995 ◽  
Vol 396 ◽  
Author(s):  
C. M. Cotell ◽  
C.A. Carosella ◽  
S.R. Flom ◽  
S. Schiestel ◽  
N. Haralampus ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Nonlinear Optical ◽  
Uv Spectroscopy ◽  
Ion Beam ◽  
Ion Bombardment ◽  
Plan View ◽  
Ion Beam Assisted Deposition ◽  
Metal Nanocluster ◽  
Post Deposition

AbstractMetal nanocluster thin films (∼200 nm thickness) consisting of noble metal (Au) clusters (5-30 nm) in an active metal oxide (Nb2O5) matrix were deposited by evaporation or ion beam assisted deposition (IBAD). In some cases the films were given a post-deposition anneal. The microstructure of the films was examined by plan view and cross sectional transmission electron microscopy (TEM). The size of the metal nanoclusters was found to depend upon the temperature of the post-deposition anneal as well as the conditions of ion bombardment. Ion bombardment was found to stabilize smaller size particles. The linear optical properties of the films, as measured by VIS/UV spectroscopy, show particle size-dependent surface plasmon resonance effects. The nonlinear optical (NLO) properties of the nanoclusters in oxidized niobium were probed experimentally using degenerate four wave mixing (DFWM) and nonlinear transmission (NLT). The DFWM measurements yielded signals that showed strong evidence of saturation and give large values of χ(3)xxxxl. NLT measurements demonstrated that the nonlinear absorption coefficient and, hence, Imχ(3)xxxx was negative. Time resolved DFWM measurements exhibited dynamics that decayed on a several picosecond time scale. The magnitude and the picosecond dynamics of the NLO response were compared to those observed in gold nanoclusters formed by ion implantation in other media. The advantages of the IBAD method for fabricating third order NLO films include the ability to deposit films of arbitrary active region thicknesses and, more importantly, high cluster densities.

Ion Beam Mixing of Ni-Ti Bilayered Thin Films

1985 ◽  
Vol 43 ◽  
pp. 290-291
Author(s):  
A. K. Rai ◽  
R. S. Bhattacharya ◽  
M. H. Rashid
Keyword(s):  
Crystal Structure ◽  
Thin Films ◽  
Amorphous Alloys ◽  
Ion Beam ◽  
Ion Bombardment ◽  
High Energy ◽  
Mixing Efficiency ◽  
Ion Beam Mixing ◽  
Enhanced Diffusion ◽  
Binary Metal

Ion beam mixing has recently been found to be an effective method of producing amorphous alloys in the binary metal systems where the two original constituent metals are of different crystal structure. The mechanism of ion beam mixing are not well understood yet. Several mechanisms have been proposed to account for the observed mixing phenomena. The first mechanism is enhanced diffusion due to defects created by the incoming ions. Second is the cascade mixing mechanism for which the kinematicel collisional models exist in the literature. Third mechanism is thermal spikes. In the present work we have studied the mixing efficiency and ion beam induced amorphisation of Ni-Ti system under high energy ion bombardment and the results are compared with collisional models. We have employed plan and x-sectional veiw TEM and RBS techniques in the present work.

Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition

2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Fundamental Aspects of Ion Beam Assisted Deposition of Magnesium Oxide Template Films

2009 ◽  
Vol 19 (3) ◽  
pp. 3311-3314 ◽  
Author(s):  
J.R. Groves ◽  
R.F. DePaula ◽  
L. Stan ◽  
R.H. Hammond ◽  
B.M. Clemens
Keyword(s):  
Magnesium Oxide ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Ion Beam ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Ion Beam Assisted Deposition ◽  
P Type
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