Metastable Materials Formation by ion Beam Assisted Deposition: Application to M Clusters in Ceramic Matrices

1997 ◽  
Vol 504 ◽  
Author(s):  
C. A. Carosella ◽  
G. K. Hubler ◽  
C. M. Cotell ◽  
S. Schiestel
Keyword(s):  
Niobium Oxide ◽  
Film Growth ◽  
Ion Beam ◽  
Synthesis Methods ◽  
Metal Nanoclusters ◽  
Materials Synthesis ◽  
Beneficial Effects ◽  
Ion Beam Assisted Deposition ◽  
Deposition Processes ◽  
Ceramic Matrices

ABSTRACTThe collision cascade, the fundamental event in ion-solid interactions, is responsible for the beneficial effects on thin films deposited by low energy ion beam assisted deposition (IBAD) or by energetic ion assisted deposition processes in general. However, the fundamental implications of the marriage of collision cascades and film growth processes have yet to be fully realized. The first half of this paper reviews the effects of ion bombardment on film growth and reaches some new conclusions. We propose that IBAD represents a different ion-solid interaction in a fundamental sense, and that as such, it should lead to new microstructures unattainable by other materials synthesis methods.The second part of this paper discusses the deposition of metal nanoclusters in a dielectric matrix by means of beam assisted phase separation (BAPS), a term coined here to describe deposition of phase-separated multicomponent materials. Examples discussed are gold nanoparticles in both niobium oxide and silica matrices.

Inducing Grain Alignment in Metals, Compounds and Multicomponent Thin Films

2008 ◽  
Vol 1150 ◽  
Author(s):  
James M.E. Harper
Keyword(s):  
Thin Films ◽  
Film Growth ◽  
Ion Beam ◽  
Fiber Texture ◽  
Compound Formation ◽  
Grain Alignment ◽  
Ion Beam Assisted Deposition ◽  
Polycrystalline Thin Films ◽  
Grain Orientations ◽  
Specific Control

AbstractSeveral methods to induce grain alignment in polycrystalline thin films are discussed, in which directional effects can dominate over the normal evolution of fiber texture during thin film growth. Early experiments with ion beam assisted deposition showed the importance of channeling directions in selecting grain orientations with low sputtering yield or low ion damage energy density. Examples of this approach include the formation of biaxial fiber textures in Nb, Al and AlN. Grain orientations may also be selected by the release of stored energy during abnormal grain growth initiated by solute precipitation (Cu-Co) or phase transformation (TiSi2). Other energy sources such as mechanical deformation, crystallization or compound formation may also contribute to producing desired grain alignments. In multicomponent thin films, combinations of these mechanisms provide opportunities for more specific control of grain orientations.

Defect production during ion-assisted deposition of molybdenum films studied by molecular dynamics

1997 ◽  
Vol 504 ◽  
Author(s):  
Peter Klaver ◽  
Barend Thijsse
Keyword(s):  
Molecular Dynamics ◽  
Physical Vapor Deposition ◽  
Film Growth ◽  
Ion Beam ◽  
Defect Production ◽  
Deposition Surface ◽  
Ion Beam Assisted Deposition ◽  
Ion Impact ◽  
Dynamics Simulations ◽  
Argon Ion

ABSTRACTLow energy argon-ion assisted growth of thin molybdenum films (∼ 60 Å) has been studied by molecular dynamics simulations. The effects of a single ion impact are discussed, but more particularly we consider film growth from a manufacturing viewpoint and examine the properties of the completed films. Results for ion-beam assisted deposition are compared with those for unassisted growth (i.e. physical vapor deposition). Surface morphology, defect generation, argon incorporation, and the various responsible atomic mechanisms are discussed.

Ion Beam Assisted Deposition

2003 ◽  
Vol 792 ◽  
Author(s):  
James K. Hirvonen
Keyword(s):  
Thin Film ◽  
Physical Vapor Deposition ◽  
Film Growth ◽  
Ion Beam ◽  
Buffer Layers ◽  
Optical Coatings ◽  
Temperature Sensitive ◽  
Energetic Ions ◽  
Ion Beam Assisted Deposition ◽  
Tribological Coatings

ABSTRACTThe beneficial roles energetic ions play in thin film vacuum processes have long been recognized by the vacuum coating community. Optical coaters were among the first to adopt the process in the form of concurrent, low energy, directed ion beam bombardment of physical vapor deposition [electron beam] coatings for producing dense, adherent, robust, and environmentally resistant optical coatings. The international research and development community has also been actively pursuing the study of ion beam assisted deposition (IBAD) for both studying the mechanisms of ion/solid interactions during thin film growth as well as for developing coating protocols for specific application areas, including: tribological coatings, anti-corrosion coatings, optical coatings, superconducting buffer layers and coatings for temperature sensitive substrates such as polymers. This paper will review selected areas of this active field and will attempt to identify emerging application areas.

scholarly journals Incorporation of Na in Low-Temperature Deposition of CIGS Flexible Solar Cells

2009 ◽  
Vol 1210 ◽  
Author(s):  
Hendrik Zachmann ◽  
Stefan Puttnins ◽  
Felix Daume ◽  
Andreas Rahm ◽  
Karsten Otte ◽  
...  
Keyword(s):  
Low Temperature ◽  
Ion Beam ◽  
Deposition Process ◽  
Beneficial Effects ◽  
Roll To Roll ◽  
Multi Stage ◽  
Deposition Parameters ◽  
Temperature Deposition ◽  
Deposition Processes

AbstractDifferent methods for Na incorporation are known for the use of Na-free substrates like stainless steel or polyimide foil. In this work Cu(In,Ga)Se2 (CIGS) absorber layers with different amounts of Na are investigated. The CIGS samples were prepared via a roll-to-roll deposition process with ion beam assistance (Solarion) and by a multi-stage low temperature co-evaporation process (HZB). Na was either incorporated via in-situ co-evaporation of NaF (for roll-to-roll deposition) or by a Na-containing precursor (for multi-stage deposition). With increasing amounts of Na an increase of VOC is observed for both deposition tech-niques. In contrast, within the deposition parameters used, jSC decreases with increasing Na amount for co-evaporation of NaF while it seems unaffected when using a NaF precursor layer. The elemental depth profiles of the different CIGS thin films were studied via secondary ion mass spectroscopy and were found to depend strongly on the deposition technique. It seems that beneficial effects of the addition of Na are independent of the method of in-corporation, even if the distribution of Na in the CIGS layer is different due to different methods of incorporation and CIGS deposition processes.

Ion Beam Assisted Deposition- R&D to Production

1993 ◽  
Vol 316 ◽  
Author(s):  
James K. Hirvonen
Keyword(s):  
Ion Beam ◽  
Ion Bombardment ◽  
Vacuum Deposition ◽  
Ion Beam Assisted Deposition ◽  
Factors Influencing ◽  
Material Deposition ◽  
Deposition Processes ◽  
Reactive Ions

ABSTRACTIon Beam Assisted Deposition (IBAD) involves vacuum deposition processes which incorporate concurrent energetic ion bombardment and material deposition. The effects of the ions are to promote adhesion, densify the films, and to help chemically incorporate reactive ions into the coatings. Examples of IBAD studies that have progressed from R&D to production status are presented with a discussion of the technical and marketing factors influencing their commercial acceptance.

Investigation of Early Nucleation Events in Magnesium Oxide During Ion Beam Assisted Deposition

2008 ◽  
Vol 1150 ◽  
Author(s):  
James Groves ◽  
Robert Hammond ◽  
Raymond F. DePaula ◽  
Bruce M. Clemens
Keyword(s):  
Magnesium Oxide ◽  
Film Growth ◽  
Ion Beam ◽  
High Temperature Superconductors ◽  
High Energy ◽  
Abrupt Onset ◽  
Sharp Change ◽  
Heteroepitaxial Growth ◽  
Ion Beam Assisted Deposition ◽  
Mass Accumulation

AbstractIon beam assisted deposition (IBAD) is used to biaxially texture magnesium oxide (MgO), which is useful as a template for the heteroepitaxial growth of various thin film devices and most notably as a template layer for high temperature superconductors. Improvements in the quality of IBAD MgO films have been largely empirical and there is uncertainty as to the exact mechanism by which this biaxial texture is developed. Using a specially built quartz crystal microbalance (QCM) as both a substrate and monitor in conjunction with reflected high-energy electron diffraction (RHEED) acting on the same surface, we have probed the initial stages of IBAD MgO growth in-situ. We have correlated corresponding RHEED images with real-time mass accumulation QCM data during the film growth. During IBAD growth, the mass accumulation exhibits a sharp change in slope corresponding to a sudden decrease in growth rate. Corresponding RHEED images show an abrupt onset of crystallographic texture at this point. A simple model incorporating differential etch rates of the MgO film and silicon nitride substrate can be used to fit the data but is inconsistent with the behavior during ion etching with no growth. It is, therefore, postulated that a more complex mechanism is responsible for the observed behavior.

Ion-Beam-Induced Modifications of Thin Films: Growth Simulations

1987 ◽  
Vol 93 ◽  
Author(s):  
Karl-Heinz Müller
Keyword(s):  
Kinetic Energy ◽  
Film Growth ◽  
Ion Beam ◽  
Film Surface ◽  
Energetic Ions ◽  
Film Microstructure ◽  
Deposition Processes ◽  
Incident Kinetic Energy ◽  
Cluster Beam Deposition ◽  
Beam Deposition

ABSTRACTIf the thermal adatom mobility is limited during film growth, the kinetic energy delivered to the film surface by arriving species is the key parameter which determines the resulting film microstructure and properties. Kinetic models and growth simulations of nonequilibrium film growth have been used to study the influence of incident kinetic energy of adatoms and energetic ions on the film microstructure, microporosity, density, stoichiometry and epitaxy. Deposition processes like vapor, sputter, ion-assisted and ionized cluster beam deposition, could be examined in detail with particular emphasis on optical coatings. The theoretical descriptions used are based on the solid-gas, thermal spike, collision cascade and molecular dynamics model.

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