Secondary ion mass spectrometry analysis of implanted and rapid thermal processing annealed wafers for sub-100 nanometer technology

2004 ◽  
Vol 22 (1) ◽  
pp. 346 ◽  
Author(s):  
U. Ehrke ◽  
A. Sears ◽  
W. Lerch ◽  
S. Paul ◽  
G. Roters ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Thermal Processing ◽  
Secondary Ion Mass Spectrometry ◽  
Rapid Thermal Processing ◽  
Mass Spectrometry Analysis ◽  
Spectrometry Analysis ◽  
Ion Mass Spectrometry ◽  
Nanometer Technology ◽  
Secondary Ion

Calculation of Membrane Lipid Ratios Using Single-Pixel Time-of-Flight Secondary Ion Mass Spectrometry Analysis

2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Time Of Flight ◽  
Membrane Lipid ◽  
Mass Spectrometry Analysis ◽  
Spectrometry Analysis ◽  
Lipid Ratios ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Single Pixel
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