Approach for a three-dimensional on-chip quantification by secondary-ion mass spectrometry analysis

1997 ◽  
Vol 15 (3) ◽  
pp. 445-451 ◽  
Author(s):  
Hubert Gnaser
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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