Summary Abstract: High sputter rate secondary ion mass spectrometry analysis of insulators used in microelectronics and lightwave applications

1988 ◽  
Vol 6 (3) ◽  
pp. 2082-2084 ◽  
Author(s):  
F. A. Stevie ◽  
V. V. S. Rana ◽  
A. S. Harrus ◽  
T. H. Briggs ◽  
Perry Skeath
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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