Secondary ion mass spectrometry analysis strategy for shallow junctions on test and product silicon wafers

1992 ◽  
Vol 10 (1) ◽  
pp. 323 ◽  
Author(s):  
F. A. Stevie
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Silicon Wafers ◽  
Mass Spectrometry Analysis ◽  
Spectrometry Analysis ◽  
Shallow Junctions ◽  
Ion Mass Spectrometry ◽  
Analysis Strategy ◽  
Secondary Ion

Calculation of Membrane Lipid Ratios Using Single-Pixel Time-of-Flight Secondary Ion Mass Spectrometry Analysis

2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Time Of Flight ◽  
Membrane Lipid ◽  
Mass Spectrometry Analysis ◽  
Spectrometry Analysis ◽  
Lipid Ratios ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Single Pixel
Sign in / Sign up

Export Citation Format

Share Document