SiGe pMOSFET's with gate oxide fabricated by microwave electron cyclotron resonance plasma processing

1994 ◽  
Vol 15 (10) ◽  
pp. 402-405 ◽  
Author(s):  
P.W. Li ◽  
E.S. Yang ◽  
Y.F. Yang ◽  
J.O. Chu ◽  
B.S. Meyerson
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Processing ◽  
Gate Oxide ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals The Influence of Precleaning Process on the Gate Oxide Film Fabricated by Electron Cyclotron Resonance Plasma Oxidation

1997 ◽  
Vol 144 (1) ◽  
pp. 311-314 ◽  
Author(s):  
Kow‐Ming Chang ◽  
Chii‐Horng Li ◽  
Fu‐Jier Fahn ◽  
Jung‐Yu Tsai ◽  
Ta‐Hsun Yeh ◽  
...  
Keyword(s):  
Oxide Film ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Gate Oxide ◽  
Electron Cyclotron ◽  
Plasma Oxidation ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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