The Influence of Precleaning Process on the Gate Oxide Film Fabricated by Electron Cyclotron Resonance Plasma Oxidation

Kow‐Ming Chang; Chii‐Horng Li; Fu‐Jier Fahn; Jung‐Yu Tsai; Ta‐Hsun Yeh; Shih‐Wei Wang; Ji‐Yi Yang

doi:10.1149/1.1837401

The Influence of Precleaning Process on the Gate Oxide Film Fabricated by Electron Cyclotron Resonance Plasma Oxidation

Journal of The Electrochemical Society ◽

10.1149/1.1837401 ◽

1997 ◽

Vol 144 (1) ◽

pp. 311-314 ◽

Cited By ~ 1

Author(s):

Kow‐Ming Chang ◽

Chii‐Horng Li ◽

Fu‐Jier Fahn ◽

Jung‐Yu Tsai ◽

Ta‐Hsun Yeh ◽

...

Keyword(s):

Oxide Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Oxide ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Device quality low temperature gate oxide growth using electron cyclotron resonance plasma oxidation of silicon

10.31274/rtd-180813-17037 ◽

2008 ◽

Author(s):

Vishwas Jaju

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Oxide ◽

Electron Cyclotron ◽

Oxide Growth ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Comprehensive Study of Plasma Pretreatment Process for Thin Gate Oxide (<10nm) Fabricated by Electron Cyclotron Resonance Plasma Oxidation

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.6549 ◽

1996 ◽

Vol 35 (Part 1, No. 12B) ◽

pp. 6549-6554

Author(s):

Kow-Ming Chang ◽

Chii-Horng Li ◽

Fu-Jier Fahn ◽

Ta-Hsun Yeh ◽

Shih-Wei Wang

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Oxide ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Pretreatment ◽

Thin Gate Oxide ◽

Resonance Plasma ◽

Comprehensive Study

Download Full-text

Induction of octacalcium phosphate by surface modification of TiO2 film prepared by electron cyclotron resonance plasma oxidation

Interface Oral Health Science 2007 ◽

10.1007/978-4-431-76690-2_69 ◽

2008 ◽

pp. 317-321

Author(s):

Yusuke Orii ◽

Hiroshi Masumoto ◽

Takashi Goto ◽

Yoshitomo Honda ◽

Takahisa Anada ◽

...

Keyword(s):

Surface Modification ◽

Tio2 Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Octacalcium Phosphate ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

SiGe pMOSFET's with gate oxide fabricated by microwave electron cyclotron resonance plasma processing

IEEE Electron Device Letters ◽

10.1109/55.320982 ◽

1994 ◽

Vol 15 (10) ◽

pp. 402-405 ◽

Cited By ~ 43

Author(s):

P.W. Li ◽

E.S. Yang ◽

Y.F. Yang ◽

J.O. Chu ◽

B.S. Meyerson

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Processing ◽

Gate Oxide ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

A kinetics study of the electron cyclotron resonance plasma oxidation of silicon

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586421 ◽

1992 ◽

Vol 10 (2) ◽

pp. 611 ◽

Cited By ~ 44

Author(s):

J. Joseph

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Kinetics Study ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

$\bf TiO_{2}$ Thin Films Formed by Electron Cyclotron Resonance Plasma Oxidation at High Temperature and Their Application to Capacitor Dielectrics

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.l1248 ◽

1994 ◽

Vol 33 (Part 2, No. 9A) ◽

pp. L1248-L1250 ◽

Cited By ~ 18

Author(s):

Yoshio Abe ◽

Takuya Fukuda

Keyword(s):

Thin Films ◽

High Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Effect of preoxidation on deposition of thin gate-quality silicon oxide film at low temperature by using a sputter-type electron cyclotron resonance plasma

Journal of Applied Physics ◽

10.1063/1.366431 ◽

1997 ◽

Vol 82 (11) ◽

pp. 5680-5685 ◽

Cited By ~ 26

Author(s):

D. W. Gao ◽

Y. Kashiwazaki ◽

K. Muraoka ◽

H. Nakashima ◽

K. Furukawa ◽

...

Keyword(s):

Low Temperature ◽

Oxide Film ◽

Cyclotron Resonance ◽

Silicon Oxide ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Silicon Oxide Film ◽

Resonance Plasma

Download Full-text

Electron cyclotron resonance plasma oxidation studies of InP

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587035 ◽

1994 ◽

Vol 12 (2) ◽

pp. 540 ◽

Cited By ~ 4

Author(s):

Y. Z. Hu

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Electrical Properties of Germanium Oxynitride and Its Interface with Germanium Prepared by Electron-Cyclotron-Resonance Plasma Oxidation and Nitridation

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.7351 ◽

2006 ◽

Vol 45 (9B) ◽

pp. 7351-7353 ◽

Cited By ~ 9

Author(s):

Yukio Fukuda ◽

Koji Kato ◽

Hiroshi Toyota ◽

Toshiro Ono ◽

Yoshitaka Nagasato ◽

...

Keyword(s):

Electrical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Oxide film deposition by radio frequency sputtering with electron cyclotron resonance plasma stimulation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579484 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2427-2434 ◽

Cited By ~ 9

Author(s):

Morito Matsuoka ◽

Shun‐ichi Tohno

Keyword(s):

Oxide Film ◽

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Radio Frequency Sputtering ◽

Resonance Plasma

Download Full-text