A medium energy ion scattering and x-ray photoelectron spectroscopy study of physical vapor deposited thin cerium oxide films on Si(100)

2006 ◽  
Vol 100 (4) ◽  
pp. 044103 ◽  
Author(s):  
R. Barnes ◽  
D. Starodub ◽  
T. Gustafsson ◽  
E. Garfunkel
Keyword(s):  
Cerium Oxide ◽  
Photoelectron Spectroscopy ◽  
Oxide Films ◽  
Spectroscopy Study ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Medium Energy Ion Scattering

Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

2016 ◽  
Vol 48 (7) ◽  
pp. 436-439 ◽  
Author(s):  
Laurent Fauquier ◽  
Bernard Pelissier ◽  
Denis Jalabert ◽  
François Pierre ◽  
Delphine Doloy ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Medium Energy Ion Scattering ◽  
Profiling Analysis

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

2010 ◽  
Vol 42 (6-7) ◽  
pp. 1057-1060 ◽  
Author(s):  
L. Sygellou ◽  
S. Ladas ◽  
M. A. Reading ◽  
J. A. van den Berg ◽  
T. Conard ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
High K ◽  
Scattering Study ◽  
Medium Energy Ion Scattering

Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering

1995 ◽  
Vol 52 (3) ◽  
pp. 1759-1775 ◽  
Author(s):  
E. P. Gusev ◽  
H. C. Lu ◽  
T. Gustafsson ◽  
E. Garfunkel
Keyword(s):  
Growth Mechanism ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Medium Energy ◽  
Ion Scattering ◽  
Thin Silicon ◽  
Medium Energy Ion Scattering
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