Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

2016 ◽  
Vol 48 (7) ◽  
pp. 436-439 ◽  
Author(s):  
Laurent Fauquier ◽  
Bernard Pelissier ◽  
Denis Jalabert ◽  
François Pierre ◽  
Delphine Doloy ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Medium Energy Ion Scattering ◽  
Profiling Analysis

scholarly journals Structure of ultrathin films of Co on Cu(111) from normal-incidence x-ray standing wave and medium-energy ion scattering measurements

2000 ◽  
Vol 62 (24) ◽  
pp. 16984-16994 ◽  
Author(s):  
M. T. Butterfield ◽  
M. D. Crapper ◽  
T. C. Q. Noakes ◽  
P. Bailey ◽  
G. J. Jackson ◽  
...  
Keyword(s):  
Standing Wave ◽  
Ultrathin Films ◽  
Normal Incidence ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Scattering Measurements ◽  
Medium Energy Ion Scattering

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

2010 ◽  
Vol 42 (6-7) ◽  
pp. 1057-1060 ◽  
Author(s):  
L. Sygellou ◽  
S. Ladas ◽  
M. A. Reading ◽  
J. A. van den Berg ◽  
T. Conard ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
High K ◽  
Scattering Study ◽  
Medium Energy Ion Scattering

Depth profiling of ultrathin films using medium energy ion scattering

2003 ◽  
Vol 3 (1) ◽  
pp. 75-82 ◽  
Author(s):  
Joonkon Kim ◽  
W.N Lennard ◽  
C.P McNorgan ◽  
J Hendriks ◽  
I.V Mitchell ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering

Depth-profiling the composition of bimetallic nanoparticles using medium energy ion scattering

2011 ◽  
Vol 605 (1-2) ◽  
pp. 220-224 ◽  
Author(s):  
Johan Gustafson ◽  
Andrew R. Haire ◽  
Christopher J. Baddeley
Keyword(s):  
Bimetallic Nanoparticles ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering
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