A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

L. Sygellou; S. Ladas; M. A. Reading; J. A. van den Berg; T. Conard; S. De Gendt

doi:10.1002/sia.3251

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

Surface and Interface Analysis ◽

10.1002/sia.3251 ◽

2010 ◽

Vol 42 (6-7) ◽

pp. 1057-1060 ◽

Cited By ~ 11

Author(s):

L. Sygellou ◽

S. Ladas ◽

M. A. Reading ◽

J. A. van den Berg ◽

T. Conard ◽

...

Keyword(s):

Photoelectron Spectroscopy ◽

Medium Energy ◽

Ion Scattering ◽

X Ray ◽

High K ◽

Scattering Study ◽

Medium Energy Ion Scattering

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Cross characterization of ultrathin interlayers in HfO2 high-k stacks by angle resolved x-ray photoelectron spectroscopy, medium energy ion scattering, and grazing incidence extreme ultraviolet reflectometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4718433 ◽

2012 ◽

Vol 30 (4) ◽

pp. 041506 ◽

Cited By ~ 6

Author(s):

Matus Banyay ◽

Larissa Juschkin ◽

Eric Bersch ◽

Daniel Franca ◽

Michael Liehr ◽

...

Keyword(s):

Photoelectron Spectroscopy ◽

Extreme Ultraviolet ◽

Grazing Incidence ◽

Medium Energy ◽

Ion Scattering ◽

X Ray ◽

High K ◽

Medium Energy Ion Scattering

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Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

Surface and Interface Analysis ◽

10.1002/sia.5917 ◽

2016 ◽

Vol 48 (7) ◽

pp. 436-439 ◽

Cited By ~ 1

Author(s):

Laurent Fauquier ◽

Bernard Pelissier ◽

Denis Jalabert ◽

François Pierre ◽

Delphine Doloy ◽

...

Keyword(s):

Ultrathin Films ◽

Photoelectron Spectroscopy ◽

Depth Profiling ◽

Medium Energy ◽

Ion Scattering ◽

X Ray ◽

Medium Energy Ion Scattering ◽

Profiling Analysis

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Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2834689 ◽

2008 ◽

Vol 26 (1) ◽

pp. 298 ◽

Cited By ~ 6

Author(s):

G. Saheli ◽

G. Conti ◽

Y. Uritsky ◽

M. A. Foad ◽

C. R. Brundle ◽

...

Keyword(s):

Photoelectron Spectroscopy ◽

Medium Energy ◽

Ion Scattering ◽

X Ray ◽

Ultrashallow Junction ◽

Medium Energy Ion Scattering ◽

Junction Structure

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A medium energy ion scattering and x-ray photoelectron spectroscopy study of physical vapor deposited thin cerium oxide films on Si(100)

Journal of Applied Physics ◽

10.1063/1.2234820 ◽

2006 ◽

Vol 100 (4) ◽

pp. 044103 ◽

Cited By ~ 30

Author(s):

R. Barnes ◽

D. Starodub ◽

T. Gustafsson ◽

E. Garfunkel

Keyword(s):

Cerium Oxide ◽

Photoelectron Spectroscopy ◽

Oxide Films ◽

Spectroscopy Study ◽

Medium Energy ◽

Ion Scattering ◽

X Ray ◽

Medium Energy Ion Scattering

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Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

Applied Surface Science ◽

10.1016/j.apsusc.2015.02.022 ◽

2015 ◽

Vol 335 ◽

pp. 71-77 ◽

Cited By ~ 5

Author(s):

R. Boujamaa ◽

E. Martinez ◽

F. Pierre ◽

O. Renault ◽

B. Detlefs ◽

...

Keyword(s):

Photoelectron Spectroscopy ◽

Medium Energy ◽

Ion Scattering ◽

Gate Stacks ◽

X Ray ◽

Medium Energy Ion Scattering

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Film growth arising from the deposition of Au onto ani-Al–Pd–Mn quasicrystal: a medium energy ion scattering study

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/18/22/002 ◽

2006 ◽

Vol 18 (22) ◽

pp. 5017-5027 ◽

Cited By ~ 10

Author(s):

T C Q Noakes ◽

P Bailey ◽

M Draxler ◽

C F McConville ◽

A R Ross ◽

...

Keyword(s):

Film Growth ◽

Medium Energy ◽

Ion Scattering ◽

Scattering Study ◽

Medium Energy Ion Scattering

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Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness

Applied Surface Science ◽

10.1016/j.apsusc.2013.02.003 ◽

2013 ◽

Vol 281 ◽

pp. 8-16 ◽

Cited By ~ 5

Author(s):

J.A. van den Berg ◽

M.A. Reading ◽

P. Bailey ◽

T.Q.C. Noakes ◽

C. Adelmann ◽

...

Keyword(s):

Depth Resolution ◽

Medium Energy ◽

Ion Scattering ◽

Dielectric Layers ◽

High K ◽

Medium Energy Ion Scattering ◽

High K Dielectric ◽

Nanometer Thickness ◽

High Depth

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The structure of epitaxial V2O3 films and their surfaces: A medium energy ion scattering study

Surface Science ◽

10.1016/j.susc.2012.07.015 ◽

2012 ◽

Vol 606 (21-22) ◽

pp. 1716-1727 ◽

Cited By ~ 14

Author(s):

A.J. Window ◽

A. Hentz ◽

D.C. Sheppard ◽

G.S. Parkinson ◽

D.P. Woodruff ◽

...

Keyword(s):

Medium Energy ◽

Ion Scattering ◽

Scattering Study ◽

Medium Energy Ion Scattering

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Summary Abstract: Medium‐energy ion scattering study of the Si(111):As‐1×1 surface

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575186 ◽

1988 ◽

Vol 6 (3) ◽

pp. 637-638 ◽

Cited By ~ 5

Author(s):

R. L. Headrick ◽

W. R. Graham

Keyword(s):

Medium Energy ◽

Ion Scattering ◽

Scattering Study ◽

Medium Energy Ion Scattering

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Initial oxidation of Si(001)-2×1 surface studied by photoelectron spectroscopy coupled with medium energy ion scattering

Surface Science ◽

10.1016/s0039-6028(01)01165-7 ◽

2001 ◽

Vol 488 (3) ◽

pp. 249-255 ◽

Cited By ~ 18

Author(s):

Y. Hoshino ◽

T. Nishimura ◽

T. Nakada ◽

H. Namba ◽

Y. Kido

Keyword(s):

Photoelectron Spectroscopy ◽

Medium Energy ◽

Ion Scattering ◽

Initial Oxidation ◽

Medium Energy Ion Scattering

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