Study of the La-related dipole in TiN/LaOx/HfSiON/SiON/Si gate stacks using hard X-ray photoelectron spectroscopy and backside medium energy ion scattering

2015 ◽  
Vol 335 ◽  
pp. 71-77 ◽  
Author(s):  
R. Boujamaa ◽  
E. Martinez ◽  
F. Pierre ◽  
O. Renault ◽  
B. Detlefs ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Medium Energy ◽  
Ion Scattering ◽  
Gate Stacks ◽  
X Ray ◽  
Medium Energy Ion Scattering

Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

2016 ◽  
Vol 48 (7) ◽  
pp. 436-439 ◽  
Author(s):  
Laurent Fauquier ◽  
Bernard Pelissier ◽  
Denis Jalabert ◽  
François Pierre ◽  
Delphine Doloy ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Medium Energy Ion Scattering ◽  
Profiling Analysis

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

2010 ◽  
Vol 42 (6-7) ◽  
pp. 1057-1060 ◽  
Author(s):  
L. Sygellou ◽  
S. Ladas ◽  
M. A. Reading ◽  
J. A. van den Berg ◽  
T. Conard ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
High K ◽  
Scattering Study ◽  
Medium Energy Ion Scattering

Chemical and Structural Characterization of Ultrathin Dielectric Films Using AEM

1999 ◽  
Vol 592 ◽  
Author(s):  
J.H.J. Scott ◽  
E.S. Windsor
Keyword(s):  
Integrated Circuits ◽  
Photoelectron Spectroscopy ◽  
Secondary Ion Mass Spectrometry ◽  
Analytical Electron Microscopy ◽  
Silicon Oxynitride ◽  
Dielectric Films ◽  
Ion Scattering ◽  
X Ray ◽  
Integrated Intensity ◽  
Medium Energy Ion Scattering

ABSTRACTThe structure of ultrathin silicon oxynitride films, used as gate dielectrics in integrated circuits (ICs), is studied using analytical electron microscopy (AEM). Laterally homogeneous blanket films approximately 2 nm in thickness are characterized in cross section using a 300 keV field emission TEM/STEM. High resolution imaging (HRTEM) is used to investigate the accuracy and precision of film thickness measurements and their comparability to other techniques such as secondary ion mass spectrometry, spectroscopic ellipsometry, x-ray reflectivity, x-ray photoelectron spectroscopy, and medium energy ion scattering. A two dimensional magnification calibration scheme that fits a pair of basis vectors to experimental images is presented, and integrated intensity profiles are used to define film boundaries for measurement. These image processing tools simultaneously improve the repeatability of the measurements and remove subjective operator bias from the measurement process.

scholarly journals Synthesis and Growth Mechanism of Stable Prenucleated (≈0.8 nm Diameter) PbS Quantum Dots by Medium Energy Ion Scattering Spectroscopy

Materials ◽  
2019 ◽  
Vol 12 (7) ◽  
pp. 1109
Author(s):  
Young Park ◽  
Seung Park ◽  
Kang-Won Jung ◽  
Yunju Hwang ◽  
Saurav Sorcar ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Growth Mechanism ◽  
Nucleation Theory ◽  
Classical Nucleation Theory ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Vis Spectroscopy ◽  
Medium Energy Ion Scattering ◽  
Pbs Quantum Dots

In the current work, stable prenucleated PbS quantum dots (QDs) with a sub-nanometer (0.8 nm) size have been successfully synthesized via a systematically designed experiment. A detailed analysis of critical nucleation, growth, and stability for such ultrasmall prenucleated clusters is done. The experimental strategy is based on controlled concentration, temperature and injection of respective precursors, thus enabling us to control nucleation rate and separation of stable sub-nanometer PbS QDs with size 0.8 nm. Significantly, by providing additional thermal energy to sub-nanometer PbS QDs, we achieved the fully nucleated cubic crystalline structure of PbS with size of around 1.5 nm. The size and composition of the prenucleated QDs are investigated by sophisticated tools like X-ray photoelectron spectroscopy (XPS) and medium energy ion scattering (MEIS) spectroscopy which confirms the synthesis of PbS with Pb2+ rich surface while the UV-Vis spectroscopy and X-ray diffraction (XRD) data suggests an alternative crystallization path. Non-classical nucleation theory is employed to substantiate the growth mechanism of prenucleated PbS QDs.

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