Hydrogen concentration profiles in as‐deposited and annealed phosphorus‐doped silicon dioxide films

1988 ◽  
Vol 53 (21) ◽  
pp. 2036-2038 ◽  
Author(s):  
Joseph Z. Xie ◽  
Shyam P. Murarka ◽  
Xin S. Guo ◽  
William A. Lanford
Keyword(s):  
Silicon Dioxide ◽  
Hydrogen Concentration ◽  
Concentration Profiles ◽  
Silicon Dioxide Films ◽  
Doped Silicon ◽  
Phosphorus Doped

Light emission and charge trapping in Er-doped silicon dioxide films containing silicon nanocrystals

2005 ◽  
Vol 86 (15) ◽  
pp. 151914 ◽  
Author(s):  
A. Nazarov ◽  
J. M. Sun ◽  
W. Skorupa ◽  
R. A. Yankov ◽  
I. N. Osiyuk ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Nanocrystals ◽  
Light Emission ◽  
Charge Trapping ◽  
Silicon Dioxide Films ◽  
Doped Silicon ◽  
Er Doped

Characterization of fluorine-doped silicon dioxide films by Raman spectroscopy and Electron-spin resonance

2007 ◽  
Vol 515 (17) ◽  
pp. 6682-6685 ◽  
Author(s):  
K. Matsuda ◽  
Y. Yamaguchi ◽  
N. Morita ◽  
T. Matsunobe ◽  
M. Yoshikawa
Keyword(s):  
Raman Spectroscopy ◽  
Electron Spin Resonance ◽  
Silicon Dioxide ◽  
Electron Spin ◽  
Silicon Dioxide Films ◽  
Spin Resonance ◽  
Doped Silicon

The High Temperature Deposition and Evaluation of Phosphorus‐ or Boron‐Doped Silicon Dioxide Films

1979 ◽  
Vol 126 (2) ◽  
pp. 313-319 ◽  
Author(s):  
A. C. Adams ◽  
C. D. Capio ◽  
S. E. Haszko ◽  
G. I. Parisi ◽  
E. I. Povilonis ◽  
...  
Keyword(s):  
High Temperature ◽  
Silicon Dioxide ◽  
Boron Doped ◽  
Silicon Dioxide Films ◽  
Doped Silicon ◽  
Temperature Deposition
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