Phosphorus concentration profiles inp‐doped silicon dioxide measured using Auger spectroscopy
Keyword(s):
Keyword(s):
1978 ◽
Vol 149
(1-3)
◽
pp. 259-264
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1987 ◽
Vol 90
(1-3)
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pp. 291-294
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1996 ◽
Vol 35
(Part 2, No. 3A)
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pp. L273-L275
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Keyword(s):
1966 ◽
Vol 9
(6)
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pp. 619-624
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