Phosphorus concentration profiles inp‐doped silicon dioxide measured using Auger spectroscopy

1974 ◽  
Vol 45 (1) ◽  
pp. 252-256 ◽  
Author(s):  
C. C. Chang ◽  
A. C. Adams ◽  
G. Quintana ◽  
T. T. Sheng
1988 ◽  
Vol 53 (21) ◽  
pp. 2036-2038 ◽  
Author(s):  
Joseph Z. Xie ◽  
Shyam P. Murarka ◽  
Xin S. Guo ◽  
William A. Lanford

2010 ◽  
Vol 1260 ◽  
Author(s):  
Zhen Lin ◽  
Pavel Brunkov ◽  
Xueying Ma ◽  
Franck Bassani ◽  
Georges Bremond

AbstractIn this paper, individual Ge nano island on top of a silicon dioxide layer of thermally grown on a n+ type doped silicon (001) substrate have been studied. The charging ability of an individual Ge island was evaluated by EFM two-pass lift mode measurement. Such Ge nano island becomes an iso-potential and behaves as a conductive material after being charged. These charges were directly injected and were trapped homogenous in the isolated Ge island. It is also shown that the dominant charge decay mechanism during discharging of nc-Ge is related to the leakage of these trapped charges. Further more, the retention time of these trapped charges was evaluated and the electrostatic force was also studied by using different tip bias during scan. Such a study should be very useful to the Ge-nc in memory applications.


1987 ◽  
Vol 90 (1-3) ◽  
pp. 291-294 ◽  
Author(s):  
J.J. Delima ◽  
A.J. Snell ◽  
K.V. Krishna ◽  
A.E. Owen

2015 ◽  
Vol 49 (4) ◽  
pp. 265-268
Author(s):  
M. A. Saeed ◽  
N. F. Abdul Pattah ◽  
I. Hossain ◽  
H. Wagiran

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