Fast wafer level reliability monitoring as a tool to achieve automotive quality for a wafer process

Microelectronics Reliability ◽

10.1016/j.microrel.2016.07.120 ◽

2016 ◽

Vol 64 ◽

pp. 2-12 ◽

Cited By ~ 2

Author(s):

A. Martin ◽

R.-P. Vollertsen ◽

A. Mitchell ◽

M. Traving ◽

D. Beckmeier ◽

...

Keyword(s):

Wafer Level ◽

Reliability Monitoring

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Defect Density Reduction of Thin SiO2 MOSFET through Oxidation Pre-cleaning improvement – a Fast Wafer Level Reliability Monitoring

2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) ◽

10.1109/ipfa47161.2019.8984760 ◽

2019 ◽

Author(s):

M. H. Kamaruddin ◽

N. Soin ◽

C. Veriven ◽

C.M. How ◽

C.K. Ang

Keyword(s):

Defect Density ◽

Wafer Level ◽

Density Reduction ◽

Reliability Monitoring

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Multi-purpose EM test structure with electrical verification of the failure spot demonstrated using SWEAT for fast wafer level reliability monitoring

Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005. ◽

10.1109/icmts.2005.1452232 ◽

2005 ◽

Author(s):

A. Pietsch ◽

A. Martin ◽

J. Fazekas

Keyword(s):

Test Structure ◽

Wafer Level ◽

Reliability Monitoring

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Isothermal wafer-level electromigration test for the characterization of metal system reliability monitoring

2001 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers (Cat. No.01TH8517) ◽

10.1109/vtsa.2001.934538 ◽

2002 ◽

Cited By ~ 2

Author(s):

C.K. Kuo ◽

H.C. Yuan ◽

S.C. Lee ◽

S.Y. Lee ◽

L.H. Chu ◽

...

Keyword(s):

System Reliability ◽

Metal System ◽

Wafer Level ◽

Reliability Monitoring

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Wafer level reliability monitoring strategy of an advanced multi-process CMOS foundry

2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. ◽

10.1109/relphy.2003.1197826 ◽

2003 ◽

Cited By ~ 2

Author(s):

A. Scarpa ◽

G. Tao ◽

F.G. Kuper

Keyword(s):

Monitoring Strategy ◽

Wafer Level ◽

Reliability Monitoring

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Negative Bias Temperature Stress on PFETs within fast Wafer Level Reliability Monitoring

2008 IEEE International Integrated Reliability Workshop Final Report ◽

10.1109/irws.2008.4796093 ◽

2008 ◽

Author(s):

R.-P. Vollertsen ◽

H. Reisinger ◽

C. Schlunder

Keyword(s):

Temperature Stress ◽

Negative Bias ◽

Wafer Level ◽

Bias Temperature Stress ◽

Reliability Monitoring

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Negative Bias Temperature Stress on PFETs within fast Wafer Level Reliability Monitoring

2008 IEEE International Integrated Reliability Workshop Final Report ◽

10.1109/irws.2008.4796139 ◽

2008 ◽

Cited By ~ 1

Author(s):

R.-P. Vollertsen ◽

H. Reisinger ◽

C. Schlunder

Keyword(s):

Temperature Stress ◽

Negative Bias ◽

Wafer Level ◽

Bias Temperature Stress ◽

Reliability Monitoring

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Plasma process induced damage detection by fast wafer level reliability monitoring for automotive applications

Microelectronics Reliability ◽

10.1016/j.microrel.2016.07.129 ◽

2016 ◽

Vol 64 ◽

pp. 189-193 ◽

Cited By ~ 2

Author(s):

D. Beckmeier ◽

A. Martin

Keyword(s):

Damage Detection ◽

Automotive Applications ◽

Wafer Level ◽

Plasma Process ◽

Reliability Monitoring

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Ramped current stress for fast and reliable wafer level reliability monitoring of thin gate oxide reliability

Microelectronics Reliability ◽

10.1016/s0026-2714(03)00188-4 ◽

2003 ◽

Vol 43 (8) ◽

pp. 1215-1220 ◽

Cited By ~ 9

Author(s):

Andreas Martin ◽

Jochen von Hagen ◽

Glenn B. Alers

Keyword(s):

Gate Oxide ◽

Wafer Level ◽

Current Stress ◽

Oxide Reliability ◽

Thin Gate Oxide ◽

Reliability Monitoring

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Use of test structures for a wafer-level-reliability monitoring

Proceedings of International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1996.535658 ◽

2002 ◽

Cited By ~ 2

Author(s):

A. Papp ◽

F. Bieringer ◽

D. Koch ◽

H. Kammer ◽

H. Pohle ◽

...

Keyword(s):

Wafer Level ◽

Reliability Monitoring

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Polysilicon resistive heated scribe lane test structure for productive wafer level reliability monitoring of NBTI

International Conference on Microelectronic Test Structures, 2003. ◽

10.1109/icmts.2003.1197440 ◽

2003 ◽

Cited By ~ 3

Author(s):

W. Muth ◽

A. Martin ◽

J. von Hagen ◽

D. Smeets ◽

J. Fazekas

Keyword(s):

Test Structure ◽

Wafer Level ◽

Reliability Monitoring

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