Proceedings of International Conference on Microelectronic Test Structures
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Test structure for thermal monitoring

2002 ◽  
Author(s):  
V. Szekely ◽  
Zs. Kohari ◽  
Cs. Marta ◽  
M. Rencz ◽  
B. Courtois
Keyword(s):  
Test Structure ◽  
Thermal Monitoring

Hybrid optical-electrical overlay test structure [for CMOS]

2002 ◽  
Author(s):  
M.W. Cresswell ◽  
R.A. Allen ◽  
L.W. Linholm ◽  
W.F. Guthrie ◽  
A.W. Gurnell
Keyword(s):  
Test Structure

A test chip for the development of PIN-type silicon radiation detectors

2002 ◽  
Author(s):  
G.F. Dalla Betta ◽  
M. Boscardin ◽  
G. Verzellesi ◽  
G.U. Pignatel ◽  
A. Fazzi ◽  
...  
Keyword(s):  
Radiation Detectors ◽  
Test Chip ◽  
Type Silicon
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