scholarly journals Combining Interference Lithography and Two-Photon Lithography for Fabricating Large-Area Photonic Crystal Structures with Controlled Defects

2021 ◽  
Vol 11 (14) ◽  
pp. 6559
Author(s):  
Hongsub Jee ◽  
Min-Joon Park ◽  
Kiseok Jeon ◽  
Chaehwan Jeong ◽  
Jaehyeong Lee
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Interference Lithography ◽  
Large Area ◽  
Regular Array ◽  
Two Photon ◽  
Regular Structures ◽  
Patterned Structures ◽  
Fast Processing

Interference lithography is a promising method for fabricating large-area, defect-free three-dimensional photonic crystal structures which can be used for facilitating the realization of photonic devices with a fast processing time. Although they can be used in waveguides, resonators, and detectors, their repeated regular array patterns can only be used for limited applications. In this study, we demonstrate a method for fabricating large-area photonic crystal structures with controlled defects by combining interference lithography and two-photon lithography using a light-curable resin. By combining regular array structures and controlled patterns, monotonous but large-area regular structures can be obtained. Furthermore, the patterned structures have considerable potential for use in various applications, such as solar cells, sensors, photodetectors, micro-/nano-electronics, and cell growth.

Enhanced light extraction of scintillator using large-area photonic crystal structures fabricated by soft-X-ray interference lithography

2015 ◽  
Vol 106 (24) ◽  
pp. 241901 ◽  
Author(s):  
Zhichao Zhu ◽  
Shuang Wu ◽  
Chaofan Xue ◽  
Jun Zhao ◽  
Liansheng Wang ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Light Extraction ◽  
Interference Lithography ◽  
Large Area ◽  
X Ray

Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography

2003 ◽  
Vol 82 (11) ◽  
pp. 1667-1669 ◽  
Author(s):  
Ivan Divliansky ◽  
Theresa S. Mayer ◽  
Kito S. Holliday ◽  
Vincent H. Crespi
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Interference Lithography ◽  
Single Diffraction

Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

2006 ◽  
Vol 532-533 ◽  
pp. 568-571
Author(s):  
Ming Zhou ◽  
Hai Feng Yang ◽  
Li Peng Liu ◽  
Lan Cai
Keyword(s):  
Photonic Crystal ◽  
Femtosecond Laser ◽  
Detection System ◽  
Three Dimensional ◽  
Photon Absorption ◽  
Micro Fabrication ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Photo Polymerization ◽  
System A

The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 700nm linewidth. The line width was inversely proportional to the fabrication speed, but proportional to laser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA cross section of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did some research about its applications. With TPA photo-polymerization by means of our experimental system, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber are manufactured. These results proved that the micro-fabrication system of TPA can not only obtain the resolution down to sub-micron level, but also realize real 3D micro-fabrication.

scholarly journals New Design Concept and Fabrication Process for Three-Dimensional Silicon Photonic Crystal Structures

2007 ◽  
Vol 46 (2) ◽  
pp. 633-637 ◽  
Author(s):  
Daihei Hippo ◽  
Kei Urakawa ◽  
Yoshiyuki Kawata ◽  
Yoshishige Tsuchiya ◽  
Hiroshi Mizuta ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Design Concept ◽  
Fabrication Process ◽  
Silicon Photonic

Fabrication of Large Area “Woodpile” Photonic Crystal Structures for Near IR

2009 ◽  
Author(s):  
Neilanjan Dutta ◽  
Peng Yao ◽  
Shouyuan Shi ◽  
Ahmed Sharkawy ◽  
Ozgenc Ebil ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Large Area ◽  
Near Ir
Sign in / Sign up

Export Citation Format

Share Document