Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography

2003 ◽  
Vol 82 (11) ◽  
pp. 1667-1669 ◽  
Author(s):  
Ivan Divliansky ◽  
Theresa S. Mayer ◽  
Kito S. Holliday ◽  
Vincent H. Crespi
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Interference Lithography ◽  
Single Diffraction

scholarly journals Combining Interference Lithography and Two-Photon Lithography for Fabricating Large-Area Photonic Crystal Structures with Controlled Defects

2021 ◽  
Vol 11 (14) ◽  
pp. 6559
Author(s):  
Hongsub Jee ◽  
Min-Joon Park ◽  
Kiseok Jeon ◽  
Chaehwan Jeong ◽  
Jaehyeong Lee
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Interference Lithography ◽  
Large Area ◽  
Regular Array ◽  
Two Photon ◽  
Regular Structures ◽  
Patterned Structures ◽  
Fast Processing

Interference lithography is a promising method for fabricating large-area, defect-free three-dimensional photonic crystal structures which can be used for facilitating the realization of photonic devices with a fast processing time. Although they can be used in waveguides, resonators, and detectors, their repeated regular array patterns can only be used for limited applications. In this study, we demonstrate a method for fabricating large-area photonic crystal structures with controlled defects by combining interference lithography and two-photon lithography using a light-curable resin. By combining regular array structures and controlled patterns, monotonous but large-area regular structures can be obtained. Furthermore, the patterned structures have considerable potential for use in various applications, such as solar cells, sensors, photodetectors, micro-/nano-electronics, and cell growth.

scholarly journals New Design Concept and Fabrication Process for Three-Dimensional Silicon Photonic Crystal Structures

2007 ◽  
Vol 46 (2) ◽  
pp. 633-637 ◽  
Author(s):  
Daihei Hippo ◽  
Kei Urakawa ◽  
Yoshiyuki Kawata ◽  
Yoshishige Tsuchiya ◽  
Hiroshi Mizuta ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Design Concept ◽  
Fabrication Process ◽  
Silicon Photonic

Pattern-integrated interference lithography: single-exposure fabrication of photonic-crystal structures

2012 ◽  
Vol 51 (18) ◽  
pp. 4028 ◽  
Author(s):  
Guy M. Burrow ◽  
Matthieu C. R. Leibovici ◽  
Thomas K. Gaylord
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Interference Lithography ◽  
Single Exposure
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