scholarly journals In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching.

Shinku ◽  
2000 ◽  
Vol 43 (8) ◽  
pp. 812-816
Author(s):  
Miyuki YAMANE ◽  
Hiroki KAWADA ◽  
Hiroyuki KITSUNAI ◽  
Nobuo TSUMAKI ◽  
Manabu YAMASHITA ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
In Situ Analysis

Basic experiments on in-situ magnetized boronization by electron cyclotron resonance discharges

1997 ◽  
Vol 241-243 ◽  
pp. 1217-1221 ◽  
Author(s):  
H. Kokura ◽  
K. Sasaki ◽  
H. Toyoda ◽  
T. Mizuuchi ◽  
K. Kondo ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Basic Experiments

Electron cyclotron resonance etching of semiconductor structures studied by in-situ spectroscopic ellipsometry

1993 ◽  
Vol 233 (1-2) ◽  
pp. 253-255 ◽  
Author(s):  
Suraiya Nafis ◽  
Natale J. Ianno ◽  
Paul G. Snyder ◽  
William A. McGahan ◽  
Blaine Johs ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Semiconductor Structures
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