electron beam patterning
Recently Published Documents


TOTAL DOCUMENTS

76
(FIVE YEARS 1)

H-INDEX

13
(FIVE YEARS 0)

2020 ◽  
Vol 12 (5) ◽  
pp. 6436-6441 ◽  
Author(s):  
Ding Zhao ◽  
Bingdong Chang ◽  
Marco Beleggia

Nanoscale ◽  
2020 ◽  
Vol 12 (44) ◽  
pp. 22473-22477
Author(s):  
Guangnan Yao ◽  
Ding Zhao ◽  
Yu Hong ◽  
Shan Wu ◽  
Dongli Liu ◽  
...  

Direct electron-beam patterning of monolayer MoS2 that is covered on top by an ice thin-film was achieved.


2019 ◽  
Vol 5 (1) ◽  
Author(s):  
Mengjie Zheng ◽  
Yiqin Chen ◽  
Zhi Liu ◽  
Yuan Liu ◽  
Yasi Wang ◽  
...  

AbstractReliable fabrication of multiscale metallic patterns with precise geometry and size at both the nanoscale and macroscale is of importance for various applications in electronic and optical devices. The existing fabrication processes, which usually involve film deposition in combination with electron-beam patterning, are either time-consuming or offer limited precision. Inspired by the kirigami, an ancient handicraft art of paper cutting, this work demonstrates an electron-beam patterning process for multiscale metallic structures with significantly enhanced efficiency and precision. Similar to the kirigami, in which the final pattern is defined by cutting its contour in a paper and then removing the unwanted parts, we define the target multiscale structures by first creating nanotrench contours in a metallic film via an electron-beam-based process and then selectively peeling the separated film outside the contours. Compared with the conventional approach, which requires the exposure of the whole pattern, much less exposure area is needed for nanotrench contours, thus enabling reduced exposure time and enhanced geometric precision due to the mitigated proximity effect. A theoretical model based on interface mechanics allows a clear understanding of the nanotrench-assisted selective debonding behaviour in the peeling process. By using this fabrication process, multiscale metallic structures with sub-10-nm up to submillimetre features can be reliably achieved, having potential applications for anti-counterfeiting and gap-plasmon-enhanced spectroscopy.


Langmuir ◽  
2019 ◽  
Vol 35 (37) ◽  
pp. 11968-11978 ◽  
Author(s):  
Krzysztof Rola ◽  
Adrian Zajac ◽  
Maciej Czajkowski ◽  
Marta Fiedot-Tobola ◽  
Andrea Szpecht ◽  
...  

Crystals ◽  
2019 ◽  
Vol 9 (2) ◽  
pp. 65 ◽  
Author(s):  
Pavel Zelenovskiy ◽  
Evgeny Greshnyakov ◽  
Dmitry Chezganov ◽  
Lyubov Gimadeeva ◽  
Evgeny Vlasov ◽  
...  

We demonstrate the application of confocal Raman microscopy (CRM) for nondestructive imaging of ferroelectric domains both at the surface and in the bulk of lead magnesium niobate-lead titanate (PMN-PT) ferroelectric single crystals. The studied model periodical domain structure was created at a [001] cut of tetragonal-phase PMN-PT crystal by the electron beam patterning technique. It was shown that the surface CRM domain image coincides in details with the image obtained by piezoresponse force microscopy.


Nanoscale ◽  
2019 ◽  
Vol 11 (3) ◽  
pp. 1245-1252 ◽  
Author(s):  
Kaixi Bi ◽  
Yiqin Chen ◽  
Qiang Wan ◽  
Tuo Ye ◽  
Quan Xiang ◽  
...  

Reliable fabrication of gold nanoparticles with desirable size, geometry and spatial arrangement is essential for plasmonic applications.


2018 ◽  
Vol 26 (9) ◽  
pp. 555-560 ◽  
Author(s):  
Elisabeth Bodenstein ◽  
Matthias Schober ◽  
Marie Hoffmann ◽  
Christoph Metzner ◽  
Uwe Vogel

2018 ◽  
Vol 20 (2) ◽  
Author(s):  
Hadar Zafri ◽  
Jonathan Azougi ◽  
Olga Girshevitz ◽  
Zeev Zalevsky ◽  
David Zitoun

2017 ◽  
Vol 28 (42) ◽  
pp. 425301 ◽  
Author(s):  
Li-Cheng Chang ◽  
Chun Nien ◽  
Jia-Hao Ye ◽  
Cheng-Huan Chung ◽  
Vin-Cent Su ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document