ecr plasma etching
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Author(s):  
Haruyosi HAMA ◽  
Kyohei TERAO ◽  
Hidekuni TAKAO ◽  
Fusao SIMOKAWA ◽  
Fumikazu OOHIRA ◽  
...  

2013 ◽  
Vol 679 ◽  
pp. 41-45 ◽  
Author(s):  
Husain Mushahid ◽  
Raman Swati

The present research work is focused on fabricating the chalcogenide glass optical waveguides keeping in mind their application in optical communication. The propagation loss of the waveguides is also studied at three different wavelengths. The waveguides were fabricated by dry etching using ECR Plasma etching and the propagation loss is studied using Fabry-Perot technique. The waveguides having loss as low as 0.35 dB/cm at 1.3m is achieved. The technique used to fabricate waveguide is simple and cost effective.


2005 ◽  
Vol 5 (4) ◽  
pp. 351-355 ◽  
Author(s):  
L.S.S. Singh ◽  
K.P. Tiwary ◽  
R.K. Purohit ◽  
Z.H. Zaidi ◽  
M. Husain

2004 ◽  
Vol 412-414 ◽  
pp. 1442-1446 ◽  
Author(s):  
H. Akaike ◽  
Y. Kitagawa ◽  
T. Satoh ◽  
K. Hinode ◽  
S. Nagasawa ◽  
...  

2004 ◽  
Author(s):  
Petr G. Babaevsky ◽  
Andrey A. Zhukov ◽  
Svetlana A. Zhukova ◽  
Yury S. Tchetverov ◽  
Sergei Y. Shapoval

2002 ◽  
Vol 190 (1-4) ◽  
pp. 361-365 ◽  
Author(s):  
Zhi Jin ◽  
Tamotsu Hashizume ◽  
Hideki Hasegawa

2001 ◽  
Vol 30 (6) ◽  
pp. 733-737 ◽  
Author(s):  
A. J. Stoltz ◽  
M. R. Banish ◽  
J. H. Dinan ◽  
J. D. Benson ◽  
D. R. Brown ◽  
...  

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