ecr plasma etching
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2014 ◽
Vol 2014
(0)
◽
pp. _E-2-5-1_-_E-2-5-3_
2013 ◽
Vol 679
◽
pp. 41-45
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Keyword(s):
2004 ◽
Vol 412-414
◽
pp. 1442-1446
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2002 ◽
Vol 190
(1-4)
◽
pp. 361-365
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2001 ◽
Vol 30
(6)
◽
pp. 733-737
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