Study on Ignition and Electron Emission Characteristics of Inductively Coupled Plasma Cathode

2012 ◽  
Vol 10 (ists28) ◽  
pp. Pb_37-Pb_42
Author(s):  
Hiroki WATANABE ◽  
Takuya NAKABAYASHI ◽  
Satoshi KASAGAMI ◽  
Junichiro AOYAGI ◽  
Haruki TAKEGAHARA
Keyword(s):  
Electron Emission ◽  
Inductively Coupled Plasma ◽  
Emission Characteristics ◽  
Plasma Cathode ◽  
Inductively Coupled

Dependence of Cathode Configuration on Performance in an Inductively Coupled Plasma Cathode

2018 ◽  
Vol 34 (3) ◽  
pp. 668-678 ◽  
Author(s):  
Hiroki Watanabe ◽  
Haruki Takegahara ◽  
Junichiro Aoyagi
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Cathode ◽  
Inductively Coupled

scholarly journals Bulk molybdenum field emitters by inductively coupled plasma etching

2016 ◽  
Vol 18 (48) ◽  
pp. 33152-33157 ◽  
Author(s):  
Ningli Zhu ◽  
Matthew T. Cole ◽  
William I. Milne ◽  
Jing Chen
Keyword(s):  
Plasma Etching ◽  
Electron Emission ◽  
Inductively Coupled Plasma ◽  
Field Electron Emission ◽  
Processing Conditions ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Field Emitters ◽  
Field Electron

Processing conditions are herein explored for the etching of bulk Mo by inductively coupled plasma towards nano tip arrays for field electron emission applications.

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