Low-Field Electron Emission Capability of Thin Films on Flat Silicon Substrates: Experiments with Mo and General Model for Refractory Metals and Carbon

Herein, we describe a study of the phenomenon of field-induced electron emission from thin films deposited on flat Si substrates. Films of Mo with an effective thickness of 6–10 nm showed room-temperature low-field emissivity; a 100 nA current was extracted at macroscopic field magnitudes as low as 1.4–3.7 V/μm. This result was achieved after formation treatment of the samples by combined action of elevated temperatures (100–600 °C) and the electric field. Morphology of the films was assessed by AFM, SEM, and STM/STS methods before and after the emission tests. The images showed that forming treatment and emission experiments resulted in the appearance of numerous defects at the initially continuous and smooth films; in some regions, the Mo layer was found to consist of separate nanosized islets. Film structure reconstruction (dewetting) was apparently induced by emission-related factors, such as local heating and/or ion irradiation. These results were compared with our previous data obtained in experiments with carbon islet films of similar average thickness deposited onto identical substrates. On this basis, we suggest a novel model of emission mechanism that might be common for thin films of carbon and refractory metals. The model combines elements of the well-known patch field, multiple barriers, and thermoelectric models of low-macroscopic-field electron emission from electrically nanostructured heterogeneous materials.

Investigation of changes in field electron emission characteristics of industrial fine-grained graphite when operated in an argon atmosphere up to 10–2 Pa

Studying of field electron emission properties of carbon cathodes operating under technical vacuum conditions is a promising scientific field. Massive cathode made of commercial fine-grained graphite of MG (Russian abbreviation) grade is being investigated. Experiments on obtaining current-voltage characteristics and long-term testing are being carried out. The emitter made of fine-grained graphite demonstrates good emission properties under technical vacuum conditions. Carbon cathode is capable of operating at pressures up to 2×10–2 Pa. Increased pressure in the vacuum chamber leads to deterioration of cathode emission properties. Electric field enhancement factors were calculated for all stages of studies. Analysis of experimental data demonstrates decrease in enhancement factor due to ion bombardment of cathode surface during exploitation. This results in higher electric field for operation of investigated graphite cold cathodes.