Spatial emission characteristics and excitation mechanisms in the inductively coupled plasma. A review

1986 ◽  
Vol 1 (5) ◽  
pp. 325 ◽  
Author(s):  
John Davies ◽  
Richard D. Snook
Author(s):  
Hiroki WATANABE ◽  
Takuya NAKABAYASHI ◽  
Satoshi KASAGAMI ◽  
Junichiro AOYAGI ◽  
Haruki TAKEGAHARA

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