Dependence of Cathode Configuration on Performance in an Inductively Coupled Plasma Cathode

2018 ◽  
Vol 34 (3) ◽  
pp. 668-678 ◽  
Author(s):  
Hiroki Watanabe ◽  
Haruki Takegahara ◽  
Junichiro Aoyagi
Author(s):  
Hiroki WATANABE ◽  
Takuya NAKABAYASHI ◽  
Satoshi KASAGAMI ◽  
Junichiro AOYAGI ◽  
Haruki TAKEGAHARA

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