scholarly journals Growth and high rate reactive ion etching of epitaxially grown barium hexaferrite films on single crystal SiC substrates

2008 ◽  
Author(s):  
Zhaohui Chen
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Barium Hexaferrite ◽  
High Rate ◽  
Ion Etching ◽  
Single Crystal Sic

High-rate reactive ion etching of barium hexaferrite films using optimal CHF3/SF6 gas mixtures

2009 ◽  
Vol 94 (11) ◽  
pp. 112505 ◽  
Author(s):  
Zhaohui Chen ◽  
Aria Yang ◽  
Changqing Xie ◽  
Qinghua Yang ◽  
C. Vittoria ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Barium Hexaferrite ◽  
Gas Mixtures ◽  
High Rate ◽  
Ion Etching

scholarly journals Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

2018 ◽  
Vol 4 (1) ◽  
Author(s):  
Adrien Toros ◽  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Hamed Sattari ◽  
Pascal Gallo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Single Crystal Diamond ◽  
Mechanical Components

scholarly journals Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

2018 ◽  
Vol 30 (11) ◽  
pp. 1705501 ◽  
Author(s):  
Ling Xie ◽  
Tony X. Zhou ◽  
Rainer J. Stöhr ◽  
Amir Yacoby
Keyword(s):  
Single Crystal ◽  
Crystallographic Orientation ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Single Crystal Diamond

High rate reactive ion etching of Al2O3 and Si

1980 ◽  
Vol 17 (3) ◽  
pp. 731-734 ◽  
Author(s):  
Neil Heiman ◽  
Vincent Minkiewicz ◽  
Brian Chapman
Keyword(s):  
Reactive Ion Etching ◽  
High Rate ◽  
Ion Etching

Inductively-coupled-plasma reactive ion etching of single-crystal β-Ga2O3

2017 ◽  
Vol 56 (3) ◽  
pp. 030304 ◽  
Author(s):  
Liheng Zhang ◽  
Amit Verma ◽  
Huili (Grace) Xing ◽  
Debdeep Jena
Keyword(s):  
Single Crystal ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled
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