Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

2018 ◽  
Author(s):  
Teodoro Graziosi ◽  
Sichen Mi ◽  
Niels Quack ◽  
Marcell Kiss
Keyword(s):  
Single Crystal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Disk Resonators ◽  
Single Crystal Diamond ◽  
Focused Ion Beam Milling

scholarly journals Single crystal diamond micro-disk resonators by focused ion beam milling

APL Photonics ◽  
2018 ◽  
Vol 3 (12) ◽  
pp. 126101 ◽  
Author(s):  
Teodoro Graziosi ◽  
Sichen Mi ◽  
Marcell Kiss ◽  
Niels Quack
Keyword(s):  
Single Crystal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Disk Resonators ◽  
Single Crystal Diamond ◽  
Focused Ion Beam Milling

scholarly journals Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

2018 ◽  
Vol 4 (1) ◽  
Author(s):  
Adrien Toros ◽  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Hamed Sattari ◽  
Pascal Gallo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Single Crystal Diamond ◽  
Mechanical Components

scholarly journals Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

2018 ◽  
Vol 30 (11) ◽  
pp. 1705501 ◽  
Author(s):  
Ling Xie ◽  
Tony X. Zhou ◽  
Rainer J. Stöhr ◽  
Amir Yacoby
Keyword(s):  
Single Crystal ◽  
Crystallographic Orientation ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Single Crystal Diamond

Deep reactive ion etching and focused ion beam combination for nanotip fabrication

2006 ◽  
Vol 26 (2-3) ◽  
pp. 164-168 ◽  
Author(s):  
G. Villanueva ◽  
J.A. Plaza ◽  
A. Sánchez-Amores ◽  
J. Bausells ◽  
E. Martínez ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Beam Combination

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

2010 ◽  
Vol 10 (1) ◽  
pp. 497-501 ◽  
Author(s):  
David Caballero ◽  
Guillermo Villanueva ◽  
Jose Antonio Plaza ◽  
Christopher A. Mills ◽  
Josep Samitier ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Afm Tips

Removal and characterization of focused-ion-beam-induced damaged layer on single crystal diamond surface and application to multiple depth patterning

2016 ◽  
Vol 70 ◽  
pp. 159-166 ◽  
Author(s):  
Noritaka Kawasegi ◽  
Seiya Kuroda ◽  
Noboru Morita ◽  
Kazuhito Nishimura ◽  
Makoto Yamaguchi ◽  
...  
Keyword(s):  
Single Crystal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Diamond Surface ◽  
Single Crystal Diamond

scholarly journals Surface plasmon polariton modes in a single-crystal Au nanoresonator fabricated using focused-ion-beam milling

2008 ◽  
Vol 92 (8) ◽  
pp. 083110 ◽  
Author(s):  
E. J. R. Vesseur ◽  
R. de Waele ◽  
H. J. Lezec ◽  
H. A. Atwater ◽  
F. J. García de Abajo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Surface Plasmon ◽  
Surface Plasmon Polariton ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Plasmon Polariton ◽  
Focused Ion Beam Milling
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