scholarly journals Fabrication of High Reflection Gratings in Single Crystal Diamond by Reactive Ion Etching

2019 ◽  
Author(s):  
Gergely Huszka ◽  
Mehdi Naamoun ◽  
Niels Quack
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Single Crystal Diamond ◽  
Reflection Gratings ◽  
High Reflection

scholarly journals Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

2018 ◽  
Vol 4 (1) ◽  
Author(s):  
Adrien Toros ◽  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Hamed Sattari ◽  
Pascal Gallo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Single Crystal Diamond ◽  
Mechanical Components

scholarly journals Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

2018 ◽  
Vol 30 (11) ◽  
pp. 1705501 ◽  
Author(s):  
Ling Xie ◽  
Tony X. Zhou ◽  
Rainer J. Stöhr ◽  
Amir Yacoby
Keyword(s):  
Single Crystal ◽  
Crystallographic Orientation ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Single Crystal Diamond

scholarly journals Precision Micro-Optical Components in Single Crystal Diamond by Deep Reactive Ion Etching

2019 ◽  
Author(s):  
Adrien Toros ◽  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Hamed Sattari ◽  
Pascal Gallo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Optical Components ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Single Crystal Diamond

Inductively-coupled-plasma reactive ion etching of single-crystal β-Ga2O3

2017 ◽  
Vol 56 (3) ◽  
pp. 030304 ◽  
Author(s):  
Liheng Zhang ◽  
Amit Verma ◽  
Huili (Grace) Xing ◽  
Debdeep Jena
Keyword(s):  
Single Crystal ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled
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