Laser Induced Fluorescence and Optical Emission Studies of Fluorocarbon Plasmas

1987 ◽  
Vol 98 ◽  
Author(s):  
J. P. Booth ◽  
C. Hancock ◽  
N. D. Perry ◽  
D. C. W. Blaikleye ◽  
J. A. Cairns ◽  
...  
Keyword(s):  
Gas Phase ◽  
Optical Emission Spectroscopy ◽  
Removal Rate ◽  
Dominant Role ◽  
Optical Emission ◽  
Laser Induced Fluorescence ◽  
Fluorocarbon Plasmas ◽  
Emission Studies ◽  
Phase Chemical ◽  
Surface Removal

ABSTRACTLaser induced fluorescence of CF2 has been observed in plasmas of CF4 and its mixtures with O2 and H2. Surface removal rates of the radical in pure CF4 were measured by observing the decay of the radical when the plasma is switched off. The reduction in CF2 concentration, and the increase in F atom concentrations (the latter measured by optical emission spectroscopy) on the addition of O2 is reproduced by a model of the plasma in which gas phase chemical reactions play a dominant role. The increase in CF2 concentration on the addition of H2 to a CF4 plasma is shown to be due to a reduction in the surface removal rate.

scholarly journals Characterization of the Chemical Kinetics in an O2/HMDSO RF Plasma for Material Processing

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Ruggero Barni ◽  
Stefano Zanini ◽  
Claudia Riccardi
Keyword(s):  
Gas Phase ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Operating Conditions ◽  
Rf Plasma ◽  
Primary Role ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Charged Species

Experimental study of the plasma gas phase in low-pressure radiofrequency discharges of oxygen and hexamethyldisiloxane is presented. The plasma phase has been studied by means of optical emission spectroscopy. Mass spectroscopy of the neutral and of the charged species has been performed too, directly sampling the plasma gas phase, by a dedicated spectrometer. We also measured the ion energy distribution. We have studied the influence of the operating conditions on the plasma gas-phase composition which plays a primary role in the formation process of SiO2 films, which are known for their important applicative uses.

scholarly journals Characterization of the electrical and optical properties of a gliding arc tornado device

2021 ◽  
Vol 75 (5) ◽  
Author(s):  
R. Barni ◽  
P. Alex ◽  
A. Salanti ◽  
C. Canevali ◽  
L. Zoia ◽  
...  
Keyword(s):  
Gas Phase ◽  
Optical Emission Spectroscopy ◽  
Polymeric Nanoparticles ◽  
Optical Emission ◽  
Electrical Characteristics ◽  
Electrical And Optical Properties ◽  
Gliding Arc ◽  
Extended Analysis ◽  
Plasma Applications

Abstract Optical emission spectroscopy was used to characterize the gas phase in a gliding arc tornado reactor used for plasma applications. Results concerning the transition between spark and fully developed arc regimes are presented, by comparing with the electrical characteristics of the discharge. An extended analysis of spectra of air and helium discharges mixed with water and hexamethyldisiloxane vapors was performed, with the identification of active radical species involved in the surface functionalization of polymeric nanoparticles. Graphic abstract

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