Diagnostics of DC-pulse SiH4 plasmas using laser-induced fluorescence and optical emission spectroscopy
1994 ◽
Vol 141
(2)
◽
pp. 89-93
1986 ◽
Vol 84
(5)
◽
pp. 2668-2674
◽
1983 ◽
Vol 3
(2)
◽
pp. 193-218
◽
2016 ◽
2018 ◽
2021 ◽
Vol 1764
(1)
◽
pp. 012030