scholarly journals Characterization of the Chemical Kinetics in an O2/HMDSO RF Plasma for Material Processing

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Ruggero Barni ◽  
Stefano Zanini ◽  
Claudia Riccardi
Keyword(s):  
Gas Phase ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Operating Conditions ◽  
Rf Plasma ◽  
Primary Role ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Charged Species

Experimental study of the plasma gas phase in low-pressure radiofrequency discharges of oxygen and hexamethyldisiloxane is presented. The plasma phase has been studied by means of optical emission spectroscopy. Mass spectroscopy of the neutral and of the charged species has been performed too, directly sampling the plasma gas phase, by a dedicated spectrometer. We also measured the ion energy distribution. We have studied the influence of the operating conditions on the plasma gas-phase composition which plays a primary role in the formation process of SiO2 films, which are known for their important applicative uses.

Optical Emission Spectroscopy Study of Magnetron Assisted Ni-Ti DC Sputtering

2006 ◽  
Vol 514-516 ◽  
pp. 1274-1278
Author(s):  
Marcia Silva ◽  
Paulo R. Gordo ◽  
Manuel J.P. Maneira ◽  
Francisco Manuel Braz Fernandes
Keyword(s):  
Thin Films ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Processing Parameters ◽  
Operating Conditions ◽  
Argon Pressure ◽  
Spectroscopy Study ◽  
Dc Sputtering

Ni-Ti thin films where the R-phase transformation occurs between 55°C and 30°C, the peak temperature being 40°C, have been produced. These thin films have been grown using a magnetron assisted system of dc sputtering, with a Glow-Discharge Optical Emission Spectroscopy device. The OES technique has been used to investigate the spatial distribution of sputtered atoms from the cathode to the substrate in different operating conditions: Argon pressure of 5 and 9x10 – 4 Torr, without polarization and with – 60 V bias. Structural characterization of the thin films has been made by XRD and the transformation temperatures associated to the shape memory effect have been determined by DSC. A discussion of the optimization of the processing parameters (Argon pressure and polarization) is then presented.

scholarly journals Characterization of the electrical and optical properties of a gliding arc tornado device

2021 ◽  
Vol 75 (5) ◽  
Author(s):  
R. Barni ◽  
P. Alex ◽  
A. Salanti ◽  
C. Canevali ◽  
L. Zoia ◽  
...  
Keyword(s):  
Gas Phase ◽  
Optical Emission Spectroscopy ◽  
Polymeric Nanoparticles ◽  
Optical Emission ◽  
Electrical Characteristics ◽  
Electrical And Optical Properties ◽  
Gliding Arc ◽  
Extended Analysis ◽  
Plasma Applications

Abstract Optical emission spectroscopy was used to characterize the gas phase in a gliding arc tornado reactor used for plasma applications. Results concerning the transition between spark and fully developed arc regimes are presented, by comparing with the electrical characteristics of the discharge. An extended analysis of spectra of air and helium discharges mixed with water and hexamethyldisiloxane vapors was performed, with the identification of active radical species involved in the surface functionalization of polymeric nanoparticles. Graphic abstract

Argon-Oxygen Post-Discharge Treatment of Hexatriacontane: Heat Transfer between Gas Phase and Sample

2008 ◽  
Vol 373-374 ◽  
pp. 421-425 ◽  
Author(s):  
M. Mafra ◽  
Thierry Belmonte ◽  
A.M. Maliska ◽  
A.S. da Silva Sobrinho ◽  
U. Cvelbar ◽  
...  
Keyword(s):  
Gas Phase ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Rotational Spectrum ◽  
Gas Temperature ◽  
Transition Intensity ◽  
Post Discharge ◽  
Transition Surface

Characterization of the interaction between an argon-oxygen post-discharge and hexatriacontane (C36H74) is carried out. Optical emission spectroscopy using the atmospheric band O2 (b1Σg +, v=0 X3Σg −, v’=0) at 760 nm gives simultaneously the evolution of the O(3P) concentration above the surface and the gas temperature by simulation of the rotational spectrum of the transition. Surface reactions contribute to the heating in the sample and to a substantial increase in the gas temperature. Finally, a strong correlation between the time evolutions of the transition intensity and the sample temperature is observed, suggesting that O(3P) is the main reactive species that produces the heating and the chemical changes in the HTC.

Applicability of optical emission spectroscopy techniques for characterization of Ar and Ar/O2 discharges

2021 ◽  
Vol 54 (27) ◽  
pp. 275203
Author(s):  
M Nikolić ◽  
I Sepulveda ◽  
C Gonzalez ◽  
N Khogeer ◽  
M Fernandez-Monteith
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission

Experimental characterization of argon/air mixture microwave plasmas using optical emission spectroscopy

2020 ◽  
Vol 370 ◽  
pp. 111278 ◽  
Author(s):  
Sébastien Rassou ◽  
Alain Piquemal ◽  
Nofel Merbahi ◽  
Fréderic Marchal ◽  
Mohammed Yousfi
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Experimental Characterization ◽  
Microwave Plasmas
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