Evolution of SOI MOSFETs: from Single Gate to Multiple Gates
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AbstractTo improve short-channel characteristics and increase current drive, SOI technology is shifting focus from “classical” single-gate MOSFET architectures to multiple-gate device structures. This paper traces the history of single- and multiple-gate SOI MOSFETs and summarizes the electrical characteristics of such devices.
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2007 ◽
Vol 51
(9)
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pp. 1245-1249
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2012 ◽
Vol 13
(7)
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pp. 1185-1191
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2017 ◽
Vol 897
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pp. 545-548
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1999 ◽
Vol 4
(S1)
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pp. 697-702
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1981 ◽
Vol 4
(2)
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pp. 267-273
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