Short channel characteristics of quasi-single-drain MOSFETs

2001 ◽  
Vol 22 (7) ◽  
pp. 351-353 ◽  
Author(s):  
K. Sugihara ◽  
Y. Abe ◽  
T. Oishi ◽  
N. Miura ◽  
Y. Tokuda
2003 ◽  
Vol 765 ◽  
Author(s):  
Jean-Pierre Colinge

AbstractTo improve short-channel characteristics and increase current drive, SOI technology is shifting focus from “classical” single-gate MOSFET architectures to multiple-gate device structures. This paper traces the history of single- and multiple-gate SOI MOSFETs and summarizes the electrical characteristics of such devices.


1998 ◽  
Author(s):  
Toshiyuki Oishi ◽  
Katsuomi Shiozawa ◽  
Akihiko Furukawa ◽  
Yuji Abe ◽  
Yasunori Tokuda

2008 ◽  
Vol 55 (6) ◽  
pp. 1480-1486 ◽  
Author(s):  
Jyi-Tsong Lin ◽  
Yi-Chuen Eng ◽  
Hau-Yuan Huang ◽  
Shiang-Shi Kang ◽  
Po-Hsieh Lin ◽  
...  

2020 ◽  
Author(s):  
Jun-Sik Yoon ◽  
Jinsu Jeong ◽  
Seunghwan Lee ◽  
Junjong Lee ◽  
Rock-Hyun Baek

DC/AC performances of 3-nm-node gate-all-around (GAA) FETs having different widths and the number of channels (Nch) from 1 to 5 were investigated thoroughly using fully-calibrated TCAD. There are two types of GAAFETs: nanowire (NW) FETs having the same width (WNW) and thickness of the channels, and nanosheet (NS) FETs having wide width (WNS) but the fixed thickness of the channels as 5 nm. Compared to FinFETs, GAAFETs can maintain good short channel characteristics as the WNW is smaller than 9 nm but irrespective of the WNS. DC performances of the GAAFETs improve as the Nch increases but at decreasing rate because of the parasitic resistances at the source/drain epi. On the other hand, gate capacitances of the GAAFETs increase constantly as the Nch increases. Therefore, the GAAFETs have minimum RC delay at the Nch near 3. For low power applications, NWFETs outperform FinFETs and NSFETs due to their excellent short channel characteristics by 2-D structural confinement. For standard and high performance applications, NSFETs outperform FinFETs and NWFETs by showing superior DC performances arising from larger effective widths per footprint. Overall, GAAFETs are great candidates to substitute FinFETs in the 3-nm technology node for all the applications.


2018 ◽  
Vol 27 (6) ◽  
pp. 2708-2712
Author(s):  
Priyanka Saha ◽  
Pritha Banerjee ◽  
Dinesh Kumar Dash ◽  
Subir Kumar Sarkar

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