scholarly journals Precision Micro-Optical Components in Single Crystal Diamond by Deep Reactive Ion Etching

2019 ◽  
Author(s):  
Adrien Toros ◽  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Hamed Sattari ◽  
Pascal Gallo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Optical Components ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Single Crystal Diamond

scholarly journals Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

2018 ◽  
Vol 4 (1) ◽  
Author(s):  
Adrien Toros ◽  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Hamed Sattari ◽  
Pascal Gallo ◽  
...  
Keyword(s):  
Single Crystal ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Single Crystal Diamond ◽  
Mechanical Components

scholarly journals Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

2018 ◽  
Vol 30 (11) ◽  
pp. 1705501 ◽  
Author(s):  
Ling Xie ◽  
Tony X. Zhou ◽  
Rainer J. Stöhr ◽  
Amir Yacoby
Keyword(s):  
Single Crystal ◽  
Crystallographic Orientation ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Single Crystal Diamond

Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays

2011 ◽  
Vol 21 (10) ◽  
pp. 105001
Author(s):  
Ahmet Erten ◽  
Milan Makale ◽  
Xuekun Lu ◽  
Bernd Fruhberger ◽  
Santosh Kesari ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

scholarly journals Correction to Ultrahigh Resolution Titanium Deep Reactive Ion Etching

2017 ◽  
Vol 9 (27) ◽  
pp. 23263-23263
Author(s):  
Bryan W. K. Woo ◽  
Shannon C. Gott ◽  
Ryan A. Peck ◽  
Dong Yan ◽  
Mathias W. Rommelfanger ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Ultrahigh Resolution ◽  
Ion Etching ◽  
Deep Reactive Ion Etching
Sign in / Sign up

Export Citation Format

Share Document