Dense plasma focus as a new pump light source for high-power lasers

1983 ◽  
Author(s):  
K. Kim ◽  
J. J. Fanning ◽  
H. Rieger
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Pump Light ◽  
Dense Plasma Focus ◽  
High Power Lasers

Performance and scaling of a dense plasma focus light source for EUV lithography

2003 ◽  
Author(s):  
Igor V. Fomenkov ◽  
Richard M. Ness ◽  
Ian R. Oliver ◽  
Stephan T. Melnychuk ◽  
Oleh V. Khodykin ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Euv Lithography

Solid-state pulsed power for driving a high-power dense plasma focus x-ray source

2000 ◽  
Vol 71 (3) ◽  
pp. 1360-1362 ◽  
Author(s):  
R. Petr ◽  
D. Reilly ◽  
J. Freshman ◽  
N. Orozco ◽  
D. Pham ◽  
...  
Keyword(s):  
Solid State ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Pulsed Power ◽  
Dense Plasma Focus ◽  
X Ray

EUV discharge light source based on a dense plasma focus operated with positive and negative polarity

2004 ◽  
Vol 37 (23) ◽  
pp. 3266-3276 ◽  
Author(s):  
I V Fomenkov ◽  
N Böwering ◽  
C L Rettig ◽  
S T Melnychuk ◽  
I R Oliver ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Negative Polarity ◽  
Dense Plasma Focus

Solid-State Pulser Development for High Power Dense Plasma Focus X-Ray Sources

2000 ◽  
Vol 39 (Part 1, No. 2A) ◽  
pp. 607-611 ◽  
Author(s):  
Rodney Petr ◽  
Dennis Reilly ◽  
Jay Freshman ◽  
Nelson Orozco ◽  
Dan Pham ◽  
...  
Keyword(s):  
Solid State ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
X Ray

Performance summary on a high power dense plasma focus x-ray lithography point source producing 70 nm line features in AlGaAs microcircuits

2004 ◽  
Vol 75 (8) ◽  
pp. 2551-2559 ◽  
Author(s):  
Rodney Petr ◽  
Alexander Bykanov ◽  
Jay Freshman ◽  
Dennis Reilly ◽  
Joseph Mangano ◽  
...  
Keyword(s):  
Point Source ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
X Ray ◽  
Line Features

Development of an EUV (13.5 nm) light source employing a dense plasma focus in lithium vapor

2000 ◽  
Author(s):  
William N. Partlo ◽  
Igor V. Fomenkov ◽  
Ian R. Oliver ◽  
Daniel L. Birx
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Lithium Vapor

Optimization of a dense plasma focus device as a light source for EUV lithography

2002 ◽  
Author(s):  
Igor V. Fomenkov ◽  
William N. Partlo ◽  
Richard M. Ness ◽  
Ian R. Oliver ◽  
Stephan T. Melnychuk ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Plasma Focus Device ◽  
Dense Plasma Focus ◽  
Euv Lithography

Performance and scaling of a dense plasma focus light source for EUV lithography

2004 ◽  
Author(s):  
Igor V. Fomenkov ◽  
Richard M. Ness ◽  
Ian R. Oliver ◽  
Stephan T. Melnychuk ◽  
Oleh V. Khodykin ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Euv Lithography
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