Performance and scaling of a dense plasma focus light source for EUV lithography

2003 ◽  
Author(s):  
Igor V. Fomenkov ◽  
Richard M. Ness ◽  
Ian R. Oliver ◽  
Stephan T. Melnychuk ◽  
Oleh V. Khodykin ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Euv Lithography

Optimization of a dense plasma focus device as a light source for EUV lithography

2002 ◽  
Author(s):  
Igor V. Fomenkov ◽  
William N. Partlo ◽  
Richard M. Ness ◽  
Ian R. Oliver ◽  
Stephan T. Melnychuk ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Plasma Focus Device ◽  
Dense Plasma Focus ◽  
Euv Lithography

Performance and scaling of a dense plasma focus light source for EUV lithography

2004 ◽  
Author(s):  
Igor V. Fomenkov ◽  
Richard M. Ness ◽  
Ian R. Oliver ◽  
Stephan T. Melnychuk ◽  
Oleh V. Khodykin ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Euv Lithography

EUV discharge light source based on a dense plasma focus operated with positive and negative polarity

2004 ◽  
Vol 37 (23) ◽  
pp. 3266-3276 ◽  
Author(s):  
I V Fomenkov ◽  
N Böwering ◽  
C L Rettig ◽  
S T Melnychuk ◽  
I R Oliver ◽  
...  
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Negative Polarity ◽  
Dense Plasma Focus

Development of an EUV (13.5 nm) light source employing a dense plasma focus in lithium vapor

2000 ◽  
Author(s):  
William N. Partlo ◽  
Igor V. Fomenkov ◽  
Ian R. Oliver ◽  
Daniel L. Birx
Keyword(s):  
Light Source ◽  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Lithium Vapor

Interaction of powerful hot plasma and fast ion streams with materials in dense plasma focus devices

2016 ◽  
Vol 113 ◽  
pp. 109-118 ◽  
Author(s):  
M. Chernyshova ◽  
V.A. Gribkov ◽  
E. Kowalska-Strzeciwilk ◽  
M. Kubkowska ◽  
R. Miklaszewski ◽  
...  
Keyword(s):  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
Hot Plasma ◽  
Fast Ion
Sign in / Sign up

Export Citation Format

Share Document