Performance summary on a high power dense plasma focus x-ray lithography point source producing 70 nm line features in AlGaAs microcircuits

2004 ◽  
Vol 75 (8) ◽  
pp. 2551-2559 ◽  
Author(s):  
Rodney Petr ◽  
Alexander Bykanov ◽  
Jay Freshman ◽  
Dennis Reilly ◽  
Joseph Mangano ◽  
...  
Keyword(s):  
Point Source ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
X Ray ◽  
Line Features

Solid-state pulsed power for driving a high-power dense plasma focus x-ray source

2000 ◽  
Vol 71 (3) ◽  
pp. 1360-1362 ◽  
Author(s):  
R. Petr ◽  
D. Reilly ◽  
J. Freshman ◽  
N. Orozco ◽  
D. Pham ◽  
...  
Keyword(s):  
Solid State ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Pulsed Power ◽  
Dense Plasma Focus ◽  
X Ray

Solid-State Pulser Development for High Power Dense Plasma Focus X-Ray Sources

2000 ◽  
Vol 39 (Part 1, No. 2A) ◽  
pp. 607-611 ◽  
Author(s):  
Rodney Petr ◽  
Dennis Reilly ◽  
Jay Freshman ◽  
Nelson Orozco ◽  
Dan Pham ◽  
...  
Keyword(s):  
Solid State ◽  
Plasma Focus ◽  
High Power ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
X Ray

Dense Plasma Focus X-ray Source For Lithography

2005 ◽  
Author(s):  
R.R. Prasad ◽  
M. Krishnan ◽  
J. Mangano ◽  
P. Burkhalter ◽  
J. Maldonado
Keyword(s):  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
X Ray

The effects of pre-ionization on the impurity and x-ray level in a dense plasma focus device

2017 ◽  
Vol 24 (2) ◽  
pp. 022509 ◽  
Author(s):  
D. Piriaei ◽  
H. R. Yousefi ◽  
T. D. Mahabadi ◽  
A. Salar Elahi ◽  
M. Ghoranneviss
Keyword(s):  
Plasma Focus ◽  
Dense Plasma ◽  
Plasma Focus Device ◽  
Dense Plasma Focus ◽  
X Ray

Interferometry and X-ray diagnostics of pinched helium plasma in a dense plasma focus with an Al-wire on the axis

2016 ◽  
Vol 23 (11) ◽  
pp. 112708 ◽  
Author(s):  
P. Kubes ◽  
M. Paduch ◽  
B. Cikhardtova ◽  
J. Cikhardt ◽  
D. Klir ◽  
...  
Keyword(s):  
Plasma Focus ◽  
Dense Plasma ◽  
Helium Plasma ◽  
Dense Plasma Focus ◽  
X Ray

Dense plasma focus X-ray source for sub-micron lithography

1993 ◽  
Author(s):  
R.R. Prasad ◽  
M. Krishnan ◽  
J. Mangano ◽  
P. Greene ◽  
N. Qi
Keyword(s):  
Plasma Focus ◽  
Dense Plasma ◽  
Dense Plasma Focus ◽  
X Ray
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