Solid-state pulsed power for driving a high-power dense plasma focus x-ray source

R. Petr; D. Reilly; J. Freshman; N. Orozco; D. Pham; L. Ngo; J. Mangano

doi:10.1063/1.1150463

Solid-state pulsed power for driving a high-power dense plasma focus x-ray source

Review of Scientific Instruments ◽

10.1063/1.1150463 ◽

2000 ◽

Vol 71 (3) ◽

pp. 1360-1362 ◽

Cited By ~ 7

Author(s):

R. Petr ◽

D. Reilly ◽

J. Freshman ◽

N. Orozco ◽

D. Pham ◽

...

Keyword(s):

Solid State ◽

Plasma Focus ◽

High Power ◽

Dense Plasma ◽

Pulsed Power ◽

Dense Plasma Focus ◽

X Ray

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Solid-State Pulser Development for High Power Dense Plasma Focus X-Ray Sources

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.607 ◽

2000 ◽

Vol 39 (Part 1, No. 2A) ◽

pp. 607-611 ◽

Cited By ~ 7

Author(s):

Rodney Petr ◽

Dennis Reilly ◽

Jay Freshman ◽

Nelson Orozco ◽

Dan Pham ◽

...

Keyword(s):

Solid State ◽

Plasma Focus ◽

High Power ◽

Dense Plasma ◽

Dense Plasma Focus ◽

X Ray

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Performance summary on a high power dense plasma focus x-ray lithography point source producing 70 nm line features in AlGaAs microcircuits

Review of Scientific Instruments ◽

10.1063/1.1771502 ◽

2004 ◽

Vol 75 (8) ◽

pp. 2551-2559 ◽

Cited By ~ 34

Author(s):

Rodney Petr ◽

Alexander Bykanov ◽

Jay Freshman ◽

Dennis Reilly ◽

Joseph Mangano ◽

...

Keyword(s):

Point Source ◽

Plasma Focus ◽

High Power ◽

Dense Plasma ◽

Dense Plasma Focus ◽

X Ray ◽

Line Features

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Solid-state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications

PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251) ◽

10.1109/ppps.2001.1001779 ◽

2002 ◽

Cited By ~ 1

Author(s):

R.M. Ness ◽

W.N. Partlo

Keyword(s):

Solid State ◽

Plasma Focus ◽

Dense Plasma ◽

Pulsed Power ◽

Dense Plasma Focus ◽

Power Module

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Solid state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961026 ◽

2002 ◽

Author(s):

R. Ness ◽

B. Partlo

Keyword(s):

Solid State ◽

Plasma Focus ◽

Dense Plasma ◽

Pulsed Power ◽

Dense Plasma Focus ◽

Power Module

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Charged particles and x-ray emission studies on a dense plasma focus device

Radiation Effects and Defects in Solids ◽

10.1080/10420150.2020.1845693 ◽

2020 ◽

Vol 175 (11-12) ◽

pp. 1015-1020

Author(s):

S. R. Chung ◽

R. A. Behbahani ◽

C. Xiao

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Charged Particles ◽

Plasma Focus Device ◽

Dense Plasma Focus ◽

X Ray ◽

Emission Studies

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Neon Dense Plasma Focus Point X-ray Source For ≤ 0.25 μm lithography

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.588868 ◽

2005 ◽

Author(s):

R.R. Prasad ◽

M. Krishnan ◽

K. Berg ◽

D. Conlon ◽

J. Mangano

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

X Ray ◽

Focus Point

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Dense Plasma Focus X-ray Source For Lithography

IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma ◽

10.1109/plasma.1992.697919 ◽

2005 ◽

Author(s):

R.R. Prasad ◽

M. Krishnan ◽

J. Mangano ◽

P. Burkhalter ◽

J. Maldonado

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

X Ray

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Time resolved neutron and hard X-ray emission in the dense plasma focus, revisited

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.605064 ◽

2002 ◽

Author(s):

J.S. Brzosko ◽

V. Nardi ◽

C. Powedll ◽

J.R. Brzosko

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

Time Resolved ◽

X Ray

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The effects of pre-ionization on the impurity and x-ray level in a dense plasma focus device

Physics of Plasmas ◽

10.1063/1.4975615 ◽

2017 ◽

Vol 24 (2) ◽

pp. 022509 ◽

Cited By ~ 5

Author(s):

D. Piriaei ◽

H. R. Yousefi ◽

T. D. Mahabadi ◽

A. Salar Elahi ◽

M. Ghoranneviss

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Plasma Focus Device ◽

Dense Plasma Focus ◽

X Ray

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Interferometry and X-ray diagnostics of pinched helium plasma in a dense plasma focus with an Al-wire on the axis

Physics of Plasmas ◽

10.1063/1.4968227 ◽

2016 ◽

Vol 23 (11) ◽

pp. 112708 ◽

Cited By ~ 2

Author(s):

P. Kubes ◽

M. Paduch ◽

B. Cikhardtova ◽

J. Cikhardt ◽

D. Klir ◽

...

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Helium Plasma ◽

Dense Plasma Focus ◽

X Ray

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