Cluster Ion Beam– Assisted Deposition

NEXAFS study on the local structures of DLC thin films formed by Ar cluster ion beam assisted deposition

10.1063/1.1619824 ◽

2003 ◽

Author(s):

Kazuhiro Kanda

Keyword(s):

Thin Films ◽

Ion Beam ◽

Local Structures ◽

Ion Beam Assisted Deposition ◽

Cluster Ion

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Development of pure O2 cluster ion beam assisted deposition system

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.07.111 ◽

2005 ◽

Vol 241 (1-4) ◽

pp. 626-629 ◽

Cited By ~ 2

Author(s):

T. Nose ◽

S. Inoue ◽

N. Toyoda ◽

K. Mochiji ◽

T. Mitamura ◽

...

Keyword(s):

Ion Beam ◽

Ion Beam Assisted Deposition ◽

Cluster Ion

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DLC film formation by Ar cluster ion beam assisted deposition

10.1063/1.1395464 ◽

2001 ◽

Author(s):

Teruyuki Kitagawa

Keyword(s):

Film Formation ◽

Ion Beam ◽

Dlc Film ◽

Ion Beam Assisted Deposition ◽

Cluster Ion

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Formation of oxide thin films for optical applications by O/sub 2/-cluster ion beam assisted deposition

1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) ◽

10.1109/iit.1998.813898 ◽

2002 ◽

Author(s):

H. Katsumata ◽

J. Matsuo ◽

T. Nishihara ◽

T. Tachibana ◽

E. Minami ◽

...

Keyword(s):

Thin Films ◽

Ion Beam ◽

Oxide Thin Films ◽

Ion Beam Assisted Deposition ◽

Cluster Ion ◽

Optical Applications

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Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) ◽

10.1109/imnc.2001.984114 ◽

2002 ◽

Author(s):

K. Kanda ◽

T. Kitagawa ◽

Y. Shimizugawa ◽

Y. Haruyama ◽

S. Matsui ◽

...

Keyword(s):

Ion Beam ◽

Dlc Film ◽

Ion Beam Assisted Deposition ◽

Cluster Ion ◽

Gas Cluster Ion Beam

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Photocatalytic properties of TiO2 films prepared by O2 cluster ion beam assisted deposition method

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.03.045 ◽

2005 ◽

Vol 232 (1-4) ◽

pp. 200-205 ◽

Cited By ~ 12

Author(s):

G.H. Takaoka ◽

M. Kawashita ◽

K. Omoto ◽

T. Terada

Keyword(s):

Ion Beam ◽

Photocatalytic Properties ◽

Tio2 Films ◽

Deposition Method ◽

Ion Beam Assisted Deposition ◽

Cluster Ion

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Stable optical thin film deposition with O2 cluster ion beam assisted deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(03)00882-6 ◽

2003 ◽

Vol 206 ◽

pp. 875-879 ◽

Cited By ~ 11

Author(s):

N. Toyoda ◽

Y. Fujiwara ◽

I. Yamada

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Film Deposition ◽

Optical Thin Film ◽

Ion Beam Assisted Deposition ◽

Cluster Ion

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Optical thin film formation by gas-cluster ion beam assisted deposition

10.1063/1.59165 ◽

1999 ◽

Author(s):

H. Katsumata ◽

J. Matsuo ◽

T. Nishihara ◽

T. Tachibana ◽

K. Yamada ◽

...

Keyword(s):

Thin Film ◽

Film Formation ◽

Ion Beam ◽

Optical Thin Film ◽

Ion Beam Assisted Deposition ◽

Cluster Ion ◽

Thin Film Formation ◽

Gas Cluster Ion Beam

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Refilling and Planarization of Patterned Surface with Amorphous Carbon Films by Using Gas Cluster Ion Beam Assisted Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.06gh13 ◽

2010 ◽

Vol 49 (6) ◽

pp. 06GH13

Author(s):

Noriaki Toyoda ◽

Tomokazu Hirota ◽

Takafumi Mashita ◽

Isao Yamada

Keyword(s):

Amorphous Carbon ◽

Ion Beam ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Patterned Surface ◽

Ion Beam Assisted Deposition ◽

Cluster Ion ◽

Gas Cluster Ion Beam

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Low-temperature formation of silicon dioxide films by oxygen cluster ion beam assisted deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.03.025 ◽

2010 ◽

Vol 518 (21) ◽

pp. S2-S5

Author(s):

Hiromichi Ryuto ◽

Takashi Yakushiji ◽

Xin Jin ◽

Gikan H. Takaoka

Keyword(s):

Low Temperature ◽

Silicon Dioxide ◽

Ion Beam ◽

Ion Beam Assisted Deposition ◽

Silicon Dioxide Films ◽

Cluster Ion ◽

Oxygen Cluster

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